A Study of Piezoresistive Pressure Sensor Technology

被引：1
|
作者：
Gupta, Lipika [1 ]
Singh, Gurinder [1 ]
Pandey, Vinay [1 ]
机构：
[1] Chitkara Univ, Chitkara Sch Engn & Technol, ECE, Solan 174103, Himachal Prades, India
来源：
THIRD INTERNATIONAL CONFERENCE ON MATERIAL SCIENCE, SMART STRUCTURES AND APPLICATIONS (ICMSS 2020) | 2021年 / 2327卷
关键词：
D O I：
10.1063/5.0039425
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The pressure sensor technology has grown to a large market since its discovery. These sensors are widely used in all spheres ranging from commercial, industrial, biomedical and even to military applications. This study tends to provide a review of the micro electro mechanical systems (MEMS) Piezomsistive Pressure Sensor Technology. This study includes the basic engineering involved in these sensors, important terms and the performance characteristics. The aim is to present the detailed research in a concise yet precise form.
引用
收藏
页数：8
相关论文
共 50 条
  • [31] A novel temperature compensated piezoresistive pressure sensor
    Aryafar, M.
    Hamedi, M.
    Ganjeh, M. M.
    MEASUREMENT, 2015, 63 : 25 - 29
  • [32] A Digital Compensation Method for Piezoresistive Pressure Sensor
    Wan, J. X.
    Tang, L. Y.
    Chen, W. J.
    Tong, M. S.
    2016 PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM (PIERS), 2016, : 654 - 657
  • [33] Temperature characteristic of Platinum Piezoresistive Pressure Sensor
    Du, Lidong
    Xiao, Li
    Zhao, Zhan
    Fang, Zhen
    Xu, Jing
    Zhao, Junjuan
    Xuan, Yundong
    MEMS/NEMS NANO TECHNOLOGY, 2011, 483 : 180 - 184
  • [34] Research on Vibration Effect of Piezoresistive Pressure Sensor
    Yuxiao, Cao
    Chunjun, Chen
    Chao, Deng
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2022, 65 (04) : 653 - 667
  • [35] Road to Development of Piezoresistive Semiconductor Pressure Sensor
    Susumu S.
    IEEJ Transactions on Sensors and Micromachines, 2024, 144 (02): : 25 - 29
  • [36] A Piezoresistive Sensor for Pressure Monitoring at Inkjet Nozzle
    Wei, Jia
    Sarro, Pasqualina M.
    Trinh Chu Duc
    2010 IEEE SENSORS, 2010, : 2093 - 2096
  • [37] IC PIEZORESISTIVE PRESSURE SENSOR FOR BIOMEDICAL INSTRUMENTATION
    SAMAUN
    WISE, KD
    ANGELL, JB
    IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1973, BM20 (02) : 101 - 109
  • [38] SELF-COMPENSATING PIEZORESISTIVE PRESSURE SENSOR
    DZIUBAN, J
    GORECKADRZAZGA, A
    LIPOWICZ, U
    INDYKA, W
    WASOWSKI, J
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 42 (1-3) : 368 - 374
  • [39] Sensitivity of Piezoresistive Pressure Sensor with Inner Diaphragm
    Hong, Chua Kean
    Ismail, Noor Faezah
    Yunus, Nurul Amziah Md
    Ahmad, Desa
    2017 IEEE ASIA PACIFIC CONFERENCE ON POSTGRADUATE RESEARCH IN MICROELECTRONICS AND ELECTRONICS (PRIMEASIA), 2017, : 129 - 132
  • [40] Modeling and analysis of a SWCNT piezoresistive pressure sensor
    Bangera, Ankitha E.
    Kulkarni, Satyabodh M.
    2013 IEEE INTERNATIONAL CONFERENCE ON EMERGING TRENDS IN COMPUTING, COMMUNICATION AND NANOTECHNOLOGY (ICE-CCN'13), 2013, : 466 - 471
12345