A Study of Piezoresistive Pressure Sensor Technology

被引：1
|
作者：
Gupta, Lipika [1 ]
Singh, Gurinder [1 ]
Pandey, Vinay [1 ]
机构：
[1] Chitkara Univ, Chitkara Sch Engn & Technol, ECE, Solan 174103, Himachal Prades, India
来源：
THIRD INTERNATIONAL CONFERENCE ON MATERIAL SCIENCE, SMART STRUCTURES AND APPLICATIONS (ICMSS 2020) | 2021年 / 2327卷
关键词：
D O I：
10.1063/5.0039425
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The pressure sensor technology has grown to a large market since its discovery. These sensors are widely used in all spheres ranging from commercial, industrial, biomedical and even to military applications. This study tends to provide a review of the micro electro mechanical systems (MEMS) Piezomsistive Pressure Sensor Technology. This study includes the basic engineering involved in these sensors, important terms and the performance characteristics. The aim is to present the detailed research in a concise yet precise form.
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页数：8
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