Capacitive ultrasonic transducer with net backplate

被引：8
作者：
Mattila, P
Stor-Pellinen, J
Ignatius, J
Hietanen, J
Luukkala, M
机构：
[1] VTT Automat, Machine Automat, FIN-33101 Tampere, Finland
[2] Univ Helsinki, Dept Phys, FIN-00014 Helsinki, Finland
[3] Aalto Univ, Lab Computat Engn, FIN-02015 Helsinki, Finland
[4] Nokia Res Ctr, FIN-33721 Tampere, Finland
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 2000年 / 11卷 / 08期
关键词：
capacitance; ultrasonic transmitting response; ultrasonic transducer; capacitive transducer; net backplate; air-borne ultrasound;
D O I：
10.1088/0957-0233/11/8/304
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A study is presented of the function of an air-coupled capacitive ultrasonic transducer with uniform net backplate. Net backplates are an easy, fast-to-assemble alternative to grooved backplates. The frequency responses of the transducers were measured and the resonance frequencies were estimated. A procedure to study the electrostatics of the transducer with net backplate geometry is described with calculations of surface charge density distribution, capacitance and sensitivity.
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页码：1119 / 1125
页数：7
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