Stand for Experimentally Studying Local Parameters of Chemically Active Induction Discharge Plasma

被引：1

作者：

Sintsov, S., V ^{[1
,2
]}

Preobrazhensky, E., I ^{[1
,2
]}

Kornev, R. A. ^{[3
]}

Vodopyanov, A. V. ^{[1
,2
]}

Mansfeld, D. A. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Appl Phys, Nizhnii Novgorod 603950, Russia

[2] Lobachevsky Natl Res Nizhny Novgorod State Univ, Nizhnii Novgorod 603022, Russia

[3] Russian Acad Sci, Inst Chem High Pur Subst, Nizhnii Novgorod 603951, Russia

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2022年 / 65卷 / 03期

基金：

俄罗斯科学基金会;

关键词：

LANGMUIR PROBE; SILICON; BORON;

D O I：

10.1134/S0020441222030058

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An experimental stand for studying the local parameters of a chemically active plasma of an induction discharge maintained at low pressure is described. Taking into account the limitations caused by the peculiarities of working with chemically aggressive media, a method is proposed for changing the spatially localized plasma parameters of the discharge using "fast" electrical probes. Methods for improving the accuracy of probe methods and smoothing the experimental current-voltage characteristics are considered.

引用

页码：419 / 425

页数：7

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