We fabricated Si1-xGex/Si photodetectors by using a staircase band gap Si1-xGex/Si structure. These devices exhibit a high optical response with a peak responsive wavelength at 0.96 mu m and a responsivity of 27.8 A/W at -5 V bias. Excellent electrical characteristics evidenced by good diode rectification are also demonstrated. The dark current density is 0.1 pA/mu m(2) at -2 V bias, and the breakdown voltage is -27 V. The high response is explained as the result of a staircase band gap by theoretical analysis. (C) 2000 American Institute of Physics. [S0003-6951(00)04528-9].
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Song JianJun
Zhang HeMing
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Zhang HeMing
Hu HuiYong
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Hu HuiYong
Dai XianYing
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
Dai XianYing
Xuan RongXi
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Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R ChinaXidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China