Thermal expansion of the isostructural PtSi and NiSi: Negative expansion coefficient in NiSi and stress effects in thin films

被引:64
作者
Detavernier, C [1 ]
Lavoie, C [1 ]
d'Heurle, FM [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1063/1.1545156
中图分类号
O59 [应用物理学];
学科分类号
摘要
NiSi displays the rare occurrence of contracting during heating along the axis with the smallest unit cell dimension. Because of stress due to the thermal mismatch between the film and the Si substrate, the unit cell dimensions reported in the Joint Committee on Powder Diffraction Standards record for NiSi are faulty. They seem to be reproducible in thin films prepared by reactive diffusion, but do not correspond to relaxed equilibrium conditions. For PtSi (isostructural with NiSi), there is neither expansion nor contraction along the axis with the small dimension during heating. In the present PtSi film, x-ray diffraction does not reveal any presence of residual thermal stresses at low temperature. (C) 2003 American Institute of Physics.
引用
收藏
页码:2510 / 2515
页数:6
相关论文
共 19 条
[1]  
[Anonymous], 1992, SMITHELLS METALS REF
[2]   FORMATION OF THIN-FILMS OF NISI - METASTABLE STRUCTURE, DIFFUSION MECHANISMS IN INTERMETALLIC COMPOUNDS [J].
DHEURLE, F ;
PETERSSON, CS ;
BAGLIN, JEE ;
LAPLACA, SJ ;
WONG, CY .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (12) :4208-4218
[3]   FORMATION OF THIN-FILMS OF COSI2 - NUCLEATION AND DIFFUSION MECHANISMS [J].
DHEURLE, FM ;
PETERSSON, CS .
THIN SOLID FILMS, 1985, 128 (3-4) :283-297
[4]   NUCLEATION OF A NEW PHASE FROM THE INTERACTION OF 2 ADJACENT PHASES - SOME SILICIDES [J].
DHEURLE, FM .
JOURNAL OF MATERIALS RESEARCH, 1988, 3 (01) :167-195
[5]   STRUCTURE REFINEMENTS FOR SOME PLATINUM METAL MONOSILICIDES [J].
GORANSSON, K ;
ENGSTROM, I ;
NOLANG, B .
JOURNAL OF ALLOYS AND COMPOUNDS, 1995, 219 :107-110
[6]   CRYSTAL-STRUCTURE AND LINEAR THERMAL EXPANSIVITIES OF PLATINUM SILICIDE AND PLATINUM GERMANIDE [J].
GRAEBER, EJ ;
BAUGHMAN, RJ ;
MOROSIN, B .
ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 1973, 29 (SEP15) :1991-1994
[8]   Effects of alloying elements on cobalt silicide formation [J].
Lavoie, C ;
Cabral, C ;
d'Heurle, FM ;
Jordan-Sweet, JL ;
Harper, JME .
JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (06) :597-609
[9]   Exploring thin-film reactions by means of simultaneous X-ray surface roughness and resistance measurements [J].
Lavoie, C ;
Cabral, C ;
d'Heurle, FM ;
Harper, JME .
DIFFUSIONS IN MATERIALS: DIMAT2000, PTS 1 & 2, 2001, 194-1 :1477-1490
[10]  
MASSALSKI TB, 1990, BINARY ALLOY PHASE D, P2859