High-resolution compact spectrometer based on a custom-printed varied-line-spacing concave blazed grating

被引:26
作者
Chen, Jianwei [1 ]
Chen, Wang [1 ]
Zhang, Guodong [2 ]
Lin, Hui [2 ]
Chen, Shih-Chi [1 ]
机构
[1] Chinese Univ Hong Kong, Dept Mech & Automat Engn, Shatin, Hong Kong, Peoples R China
[2] Chinese Acad Sci, Shenzhen Inst Adv Technol, Shenzhen 518055, Peoples R China
基金
中国国家自然科学基金;
关键词
NONPLANAR SURFACES; FABRICATION; LENS;
D O I
10.1364/OE.25.012446
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present the modeling, design and characterization of a compact spectrometer, achieving a resolution better than 1.5 nm throughout the visible spectrum (360-825 nm). The key component in the spectrometer is a custom-printed varied-line-space (VLS) concave blazed grating, where the groove density linearly decreases from the center of the grating (530 g/mm) at a rate of 0.58 nm/mm to the edge (528 g/mm). Parametric models have been established to deterministically link the system performance with the VLS grating design parameters, e.g., groove density, line-space varying rate, and to minimize the system footprint. Simulations have been performed in ZEMAX to confirm the results, indicating a 15% enhancement in system resolution versus common constant line-space (CLS) gratings. Next, the VLS concave blazed grating is fabricated via our vacuum nanoimprinting system, where a polydimethylsiloxane (PDMS) stamp is non-uniformly expanded to form the varied-line-spacing pattern from a planar commercial grating master (600 g/mm) for precision imprinting. The concave blazed grating is measured to have an absolute diffraction efficiency of 43%, higher than typical holographic gratings (similar to 30%) used in the commercial compact spectrometers. The completed compact spectrometer contains only one optical component, i.e., the VLS concave grating, as well as an entrance slit and linear photodetector array, achieving a footprint of 11 x 11 x 3 cm(3), which makes it the most compact and resolving (1.46 nm) spectrometer of its kind. (C) 2017 Optical Society of America
引用
收藏
页码:12446 / 12454
页数:9
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