Microstructure related properties of gadolinium fluoride films deposited by molybdenum boat evaporation

In order to optimize the performance of fluoride thin films in wavelength of Deep Ultraviolet (DUV), GdF3 single layers are prepared by thermal evaporation at different deposition temperatures on Fused Silica. Optical and structure properties of each sample are characterized. The results that the refrac-tive index increased gradually and the crystallization status becomes stronger with the temperature rising, the inhomogeneous of the thin films present linearity. The decrease total optical loss with deposited temper-ature is attributed to the higher packing density and lower optical absorption.