Annealing effects on the gas sensing properties of copper phthalocyanine films

被引：23
作者：
Lee, YL [1 ]
Hsiao, CY [1 ]
Hsiao, RH [1 ]
机构：
[1] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 70101, Taiwan
来源：
THIN SOLID FILMS | 2004年 / 468卷 / 1-2期
关键词：
phthalocyanine; physical vapor deposition; heat treatment; gas sensor;
D O I：
10.1016/j.tsf.2004.04.060
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Heat treatment is able to cause the structure transformation of phthalocyanine thin film either during the gas sensing operation or during the post-deposition heat treatment. The annealing effects of the two processes on the film characteristics and sensing properties of vacuum deposited copper phthalocyanine thin films were studied. The results show that the structure re-organization of CuPc film occurs during the sensing period when the sensing is operated at temperature up above 225degreesC. Such structure transformation was inhibited by post-deposition annealing at 300degreesC. However, the pre-annealing leads to a larger-grain and a more compact structure. As a result, the film sensitivity and response rate of sensing experiment are decreased after the heat treatment due to the reducing in the surface area. On the contrary, the recovery characteristic of the CuPc film is improved after heat treatment. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：280 / 284
页数：5
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