Textured ZnO thin films for solar cells grown by a two-step process with the atomic layer deposition technique

被引：106

作者：

Sang, BS ^{[1
]}

Yamada, A ^{[1
]}

Konagai, M ^{[1
]}

机构：

[1] Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 152, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1998年 / 37卷 / 2B期

关键词：

atomic layer deposition; textured ZnO; transparent conductive oxide;

D O I：

10.1143/JJAP.37.L206

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

B-doped ZnO films are prepared on Corning 7059 glass by atomic layer deposition (ALD) using diethylzinc (DEZn), H2O as reactant gases, and diborane (B2H6) as a dopant gas. A two-step deposition process is introduced to grow textured and low-resistivity ZnO films by combining the ALD and conventional photo-induced metalorgainc chemical vapor deposition (photo-MOCVD) techniques. The electrical and optical properties of ZnO films are effectively improved by depositing lower-resistivity ALD-ZnO films on the textured photo-MOCVD-ZnO films while the textured surface morphologies are well maintained. Furthermore, the resistivity of the ALD-ZnO film was further improved by the two-step process and a low resistivity of 2.0 x 10(-4) Ohm.cm was achieved for the film which was only about 400 nm thick.

引用

页码：L206 / L208

页数：3

共 6 条

[1] TEXTURED TIN OXIDE-FILMS PRODUCED BY ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION FROM TETRAMETHYLTIN AND THEIR USEFULNESS IN PRODUCING LIGHT TRAPPING IN THIN-FILM AMORPHOUS-SILICON SOLAR-CELLS [J].

GORDON, RG ;

PROSCIA, J ;

ELLIS, FB ;

DELAHOY, AE .

SOLAR ENERGY MATERIALS, 1989, 18 (05) :263-281

[2]

MAYER S, 1988, SOL ENERG MATER, V17, P319

[3] Growth of boron-doped ZnO thin films by atomic layer deposition [J].

Sang, B ;

Yamada, A ;

Konagai, M .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 49 (1-4) :19-26

[4] Growth of transparent conductive oxide ZnO films by atomic layer deposition [J].

Sang, BS ;

Konagai, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (5B) :L602-L605

[5] ELECTRICAL AND OPTICAL-PROPERTIES OF BORON-DOPED ZNO THIN-FILMS FOR SOLAR-CELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].

WENAS, WW ;

YAMADA, A ;

TAKAHASHI, K ;

YOSHINO, M ;

KONAGAI, M .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (11) :7119-7123

[6] LARGE-AREA ZNO THIN-FILMS FOR SOLAR-CELLS PREPARED BY PHOTOINDUCED METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].

YOSHINO, M ;

WENAS, WW ;

YAMADA, A ;

KONAGAI, M ;

TAKAHASHI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (02) :726-730

← 1 →