A Design Method of In-plane MEMS Electret Energy Harvester with Comb Drives

被引：6
|
作者：
Fu, Qianyan [1 ]
Suzuki, Yuji [1 ]
机构：
[1] Univ Tokyo, Dept Mech Engn, Tokyo 113, Japan
来源：
14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014) | 2014年 / 557卷
关键词：
D O I：
10.1088/1742-6596/557/1/012011
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
In this report, a design method is proposed for in-plane MEMS electrostatic energy harvesters with comb drives. Dependent on the device layer thickness and the achievable aspect ratio of the DRIE process, either the overlapping-area-change or the gap-closing converter has higher output power than the other. Two prototypes of MEMS electret energy harvesters are developed to verify the present design method.
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页数：5
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