Roughness measurements in the picometric range using a polarization interferometer and a multichannel lock-in detection technique

被引：8
|
作者：
Gleyzes, P [1 ]
Loriette, V [1 ]
Saint-Jalmes, H [1 ]
Boccara, AC [1 ]
机构：
[1] Ecole Super Phys & Chim Ind, Lab Opt, UPR A0005 CNRS, F-75005 Paris, France
来源：
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 1998年 / 38卷 / 5-6期
关键词：
D O I：
10.1016/S0890-6955(97)00122-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：715 / 717
页数：3
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