Strongly coupled three-dimensional finite element transducer

Significant advances in MEMS fabrication technology has led to the ability to create devices and components that are geometrically complex. In order to optimize the performance of these increasingly complex components, efficient finite element modelling techniques are required to understand their coupled electromechanical behaviour. In the present investigation, a novel three-dimensional (3D) distributed strongly coupled electromechanical transducer finite element is introduced. Based on energy conservation principles, the element has internal morphing to accurately capture the underlying mechanical and electrostatic domains. To demonstrate the accuracy of the new element, several numerical examples are presented and compared to available experimental data. The range of applicability of the new element, as related to the design of MEMS devices, is subsequently discussed.