Quasicontinuum simulations of geometric effect on onset plasticity of nano-scale patterned lines

被引:5
作者
Jin, Jianfeng [1 ,2 ]
Cao, Jingyi [1 ,2 ]
Zhou, Siyuan [1 ,2 ]
Yang, Peijun [1 ,2 ]
Guo, Zhengxiao [3 ,4 ]
机构
[1] Northeastern Univ, Sch Mat Sci & Engn, Shenyang 110819, Peoples R China
[2] Northeastern Univ, Key Lab Anisotropy & Texture Mat, Minist Educ, Shenyang 110819, Peoples R China
[3] UCL, Ctr Mat Res, London WC1H 0AJ, England
[4] UCL, Dept Chem, London WC1H 0AJ, England
基金
中国国家自然科学基金;
关键词
multiscale quasicontinuum method; onset plasticity; patterned line; geometric effect; nanoindentation; MOLECULAR-DYNAMICS; IMPRINT LITHOGRAPHY; CRYSTAL PLASTICITY; THIN-FILMS; NANOINDENTATION; SURFACE; DEFORMATION; NANOIMPRINT; COPPER; TEMPERATURE;
D O I
10.1088/1361-651X/aa70dc
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Onset plasticity of metallic nano-lines or nano-beams is of considerable scientific and technological interest in micro-/nano- mechanics and interconnects of patterned lines in electronic devices, where capability of resistance to deformation is important. In this study, a multiscale quasicontinuum (QC) method was used to explore such an issue in a nano-scale copper (Cu) line protruding from a relatively large single crystal Cu substrate during compression. The results show that the yield stress of a rectangular beam on the substrate can be greatly reduced compared with that of a flat surface of the same area. For the rectangular line, the aspect ratio (width/height) affects dislocation morphology at the onset plasticity without much change of yield stress. However, for the trapezoidal line, the yield stress decreases with the base angle (alpha), especially when the a is over 54.7 degrees. As the sidewall orientation changes from < 100 > at alpha = 0 degrees, then to < 111 > at alpha = 54.7 degrees and finally to < 110 > at alpha = 90 degrees, a higher surface energy could enable easier dislocation formation and lower yield stress. Meanwhile, it is found that the interaction between the line and the support substrate also shows a great effect on yield stress. Moreover, although it is possible to open two extra dislocation slip planes inside from the two bottom corners of the Cu line with the alpha over 54.7 degrees, dislocation nucleation derived from them is only observed at alpha = 90 degrees.
引用
收藏
页数:10
相关论文
共 45 条
[1]   3D equilibrium crystal shapes in the new light of STM and AFM [J].
Bonzel, HP .
PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 2003, 385 (1-2) :1-67
[2]   Sample shape and temperature strongly influence the yield strength of metallic nanopillars [J].
Cao, Ajing ;
Ma, E. .
ACTA MATERIALIA, 2008, 56 (17) :4816-4828
[3]   Size effects on the onset of plastic deformation during nanoindentation of thin films and patterned lines [J].
Choi, Y ;
Van Vliet, KJ ;
Li, J ;
Suresh, S .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (09) :6050-6058
[4]   Nanoindentation of patterned metal lines on a Si substrate [J].
Choi, Y ;
Suresh, S .
SCRIPTA MATERIALIA, 2003, 48 (03) :249-254
[5]   Imprint lithography with 25-nanometer resolution [J].
Chou, SY ;
Krauss, PR ;
Renstrom, PJ .
SCIENCE, 1996, 272 (5258) :85-87
[6]   Sub-10 nm imprint lithography and applications [J].
Chou, SY ;
Krauss, PR ;
Zhang, W ;
Guo, LJ ;
Zhuang, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06) :2897-2904
[7]   Nanoelectromechanical systems [J].
Craighead, HG .
SCIENCE, 2000, 290 (5496) :1532-1535
[8]   Dislocation emission around nanoindentations on a (001) fcc metal surface studied by scanning tunneling microscopy and atomistic simulations -: art. no. 036101 [J].
de la Fuente, OR ;
Zimmerman, JA ;
González, MA ;
de la Figuera, J ;
Hamilton, JC ;
Pai, WW ;
Rojo, JM .
PHYSICAL REVIEW LETTERS, 2002, 88 (03)
[9]   The scaling exponent in the size effect of small scale plastic deformation [J].
Dunstan, D. J. ;
Bushby, A. J. .
INTERNATIONAL JOURNAL OF PLASTICITY, 2013, 40 :152-162
[10]   A Combined Molecular Dynamics and Finite Element Analysis of Contact and Adhesion of a Rough Sphere and a Flat Surface [J].
Eid, H. ;
Adams, G. G. ;
McGruer, N. E. ;
Fortini, A. ;
Buldyrev, S. ;
Srolovitz, D. .
TRIBOLOGY TRANSACTIONS, 2011, 54 (06) :920-928