The effect of longitudinal substrate currents on the losses in silicon substrate coplanar-strip and coplanar waveguides

被引：0
|
作者：
Berg, H [1 ]
Gevorgian, S
机构：
[1] Chalmers Univ Technol, Dept Microelect, SE-41296 Gothenburg, Sweden
[2] Ericsson Microwave Syst, Dept UR, SE-43184 Molndal, Sweden
来源：
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING | 2000年 / 10卷 / 05期
关键词：
transmission lines; losses; silicon;
D O I：
10.1002/1099-047X(200009)10:53.0.CO;2-2
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
The strip currents in silicon substrate CPS and CPW induce longitudinal currents in the substrate (along the strips of the lines) causing extra microwave losses. It is shown that these losses may be minimized without introducing extra masks and process steps if the slot widths in the lines are chosen properly. (C) 2000 John Wiley & Sons, Inc.
引用
收藏
页码：284 / 288
页数：5
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