Sintering mechanism of Ag-Pd nanoalloy film for power electronic packaging

被引:31
作者
Jia, Qiang [1 ]
Zou, Guisheng [1 ]
Zhang, Hongqiang [2 ]
Wang, Wengan [1 ]
Ren, Hui [1 ]
A, Zhanwen [1 ]
Deng, Zhongyang [1 ]
Yan, Shaohua [3 ]
Shen, Daozhi [4 ]
Liu, Lei [1 ]
机构
[1] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol, Beijing 100084, Peoples R China
[2] Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R China
[3] Shenzhen Univ, Coll Phys & Optoelect Engn, Shenzhen 518060, Peoples R China
[4] Univ Waterloo, Ctr Adv Mat Joining, Inst Quantum Comp, Dept Chem, Waterloo, ON N2L 3G1, Canada
基金
中国国家自然科学基金;
关键词
Pulsed laser deposition; Ag-Pd nanoalloy film; Power electronic packaging; Low temperature bonding; Sintering behavior; NANOPARTICLE PASTE; SILVER MIGRATION; LOW-TEMPERATURE; EVOLUTION; STRENGTH; DEVICES;
D O I
10.1016/j.apsusc.2021.149579
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Silver electrochemical migration causing short-circuit could be mitigated by Ag-Pd alloy. The conventional mechanical mixed Ag and Pd nanoparticles requires high alloying temperature as high as 850 degrees C. In this work, Ag20Pd nanoalloy film is prepared using pulsed laser deposition under room temperature as die attach material. After low temperature bonding at 300 degrees C, the bondline keeps in Ag20Pd alloyed state with a shear strength of 23.5 MPa (higher than MIL-STD-883 K, 7.8 MPa). The Ag20Pd nanoalloy exhibits superior resistance to Ag ionic migration with short-circuit time tripled than pure Ag sintered layer. A Ag-rich layer appears on the surface of Ag-Pd nanoalloy, although the Ag-Pd is the typical isomorphous alloy system. Molecular dynamics simulation reveals that Ag atoms (214.0 kJ/mol) diffuse easier than that of Pd atoms (234.6 kJ/mol) on the nanoalloy surface layer, while showing similar mobility for inner nanoalloy. The Ag-rich layer consisting of dynamic exchanging atoms has a prewetting effect and contributes to the neck formation among nanoparticles. This work sheds light on the sintering mechanism of Ag-Pd nanoalloy, and it is confirmed that Ag-Pd nanoalloy is promising for low temperature bonding in terms of the high reliability power electronic.
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页数:7
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