Modification of Layer Structures of Superconducting Tunnel Junctions to Improve X-ray Energy Resolution

被引:3
|
作者
Ukibe, Masahiro [1 ]
Fujii, Go [1 ]
Shiki, Shigetomo [1 ]
Kitajima, Yoshinori [2 ]
Ohkubo, Masataka [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki, Japan
[2] High Energy Accelerator Res Org, Tsukuba, Ibaraki, Japan
关键词
Nb/Al STJ; High energy resolution; Thick Nb electrode; Quasiparticle recombination; XAFS;
D O I
10.1007/s10909-016-1488-x
中图分类号
O59 [应用物理学];
学科分类号
摘要
The layer structure of a Nb/Al-based superconducting tunnel junction (STJ) X-ray detector was modified to improve the energy resolution () of STJ X-ray detectors by suppressing the recombination of excited quasiparticles in the electrodes. A 100-pixel array of 100 100 m STJs with a symmetric layer structure of Nb (300 nm)/Al-AlO(70 nm)/Al (70 nm)/Nb (300 nm) was fabricated. Fabrication yields of the 100 pixels were more than 90 %. The average leak current of the STJ array was 8 nA. The mean of the STJ array was 6.7 1.0 eV for 400 eV X-rays. This is the best value reported for Nb/Al STJs.
引用
收藏
页码:200 / 205
页数:6
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