Comment on "MEL-type Pure-Silica Zeolite Nanocrystals Prepared by an Evaporation-Assisted Two-Stage Synthesis Method as Ultra-Low-k Materials"

被引：8

作者：

Eslava, Salvador ^{[1
]}

Seo, Jin W. ^{[2
]}

Kirschhock, Christine E. A. ^{[5
]}

Baklanov, Mikhail R. ^{[3
]}

Maex, Karen ^{[3
,4
]}

Martens, Johan A. ^{[5
]}

机构：

[1] Univ Cambridge, Dept Chem, Cambridge CB2 1EW, England

[2] Catholic Univ Louvain, Dept Met & Mat Engn, B-3001 Louvain, Belgium

[3] IMEC, B-3001 Louvain, Belgium

[4] Catholic Univ Louvain, Dept Elect Engn ESAT INSYS, B-3001 Louvain, Belgium

[5] Catholic Univ Louvain, Ctr Catalysis & Surface Sci, B-3001 Louvain, Belgium

来源：

ADVANCED FUNCTIONAL MATERIALS | 2010年 / 20卷 / 15期

关键词：

DIELECTRIC-CONSTANT FILMS; SPIN-ON; NANOPARTICLE SUSPENSIONS; MFI; FUNCTIONALIZATION;

D O I：

10.1002/adfm.201000114

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：2377 / 2379

页数：3

共 23 条

[1] Nanoporous Organosilicate Films Prepared in Acidic Conditions Using Tetraalkylammonium Bromide Porogens [J].

Eslava, Salvador ;

Baklanov, Mikhail R. ;

Urrutia, Jone ;

Kirschhock, Christine E. A. ;

Maex, Karen ;

Martens, Johan A. .

ADVANCED FUNCTIONAL MATERIALS, 2008, 18 (20) :3332-3339

[2] Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions [J].

Eslava, Salvador ;

Baklanov, Mikhail R. ;

Neimark, Alexander V. ;

Iacopi, Francesca ;

Kirschhock, Christine E. A. ;

Maex, Karen ;

Martens, Johan A. .

ADVANCED MATERIALS, 2008, 20 (16) :3110-3116

[3] Reaction of trimethylchlorosilane in spin-on silicalite-1 zeolite film [J].

Eslava, Salvador ;

Delahaye, Stephane ;

Baklanov, Mikhail R. ;

Iacopi, Francesca ;

Kirschhock, Christine E. A. ;

Maex, Karen ;

Martens, Johan A. .

LANGMUIR, 2008, 24 (09) :4894-4900

[4] Characterization of a molecular sieve coating using ellipsometric porosimetry [J].

Eslava, Salvador ;

Baklanov, Mikhail R. ;

Kirschhock, Christine E. A. ;

Iacopi, Francesca ;

Aldea, Steliana ;

Maex, Karen ;

Martens, Johan A. .

LANGMUIR, 2007, 23 (26) :12811-12816

[5] Ultraviolet-assisted curing of polycrystalline pure-silica zeolites: Hydrophobization, functionalization, and cross-linking of grains [J].

Eslava, Salvador ;

Iacopi, Francesca ;

Baklanov, Mikhail R. ;

Kirschhock, Christine E. A. ;

Maex, Karen ;

Martens, Johan A. .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2007, 129 (30) :9288-+

[6] Zeolite-Inspired Low-k Dielectrics Overcoming Limitations of Zeolite Films [J].

Eslava, Salvador ;

Urrutia, Jone ;

Busawon, Abheesh N. ;

Baklanov, Mikhail R. ;

Iacopi, Francesca ;

Aldea, Steliana ;

Maex, Karen ;

Martens, Johan A. ;

Kirschhock, Christine E. A. .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2008, 130 (51) :17528-17536

[7] Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions [J].

Eslava, Salvador ;

Kirschhock, Christine E. A. ;

Aldea, Steliana ;

Baklanov, Mikhail R. ;

Iacopi, Francesca ;

Maex, Karen ;

Martens, Johan A. .

MICROPOROUS AND MESOPOROUS MATERIALS, 2009, 118 (1-3) :458-466

[8] Identification of precursor species in the formation of MFI zeolite in the TPAOH-TEOS-H2O system [J].

Kirschhock, CEA ;

Ravishankar, R ;

Verspeurt, F ;

Grobet, PJ ;

Jacobs, PA ;

Martens, JA .

JOURNAL OF PHYSICAL CHEMISTRY B, 1999, 103 (24) :4965-4971

[9] Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization [J].

Lew, Christopher M. ;

Li, Zijian ;

Li, Shuang ;

Hwang, Son-Jong ;

Liu, Yan ;

Medina, Dora I. ;

Sun, Minwei ;

Wang, Junlan ;

Davis, Mark E. ;

Yan, Yushan .

ADVANCED FUNCTIONAL MATERIALS, 2008, 18 (21) :3454-3460

[10] Organic-functionalized pure-silica-zeolite MFI low-k films [J].

Li, S ;

Li, ZJ ;

Medina, D ;

Lew, C ;

Yan, YS .

CHEMISTRY OF MATERIALS, 2005, 17 (07) :1851-1854

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