Development of ITO thin film sensor for detection of benzene

被引：79

作者：

Vaishnav, V. S. ^{[1
]}

Patel, S. G. ^{[2
]}

Panchal, J. N. ^{[1
]}

机构：

[1] Sardar Patel Univ, Dept Elect, Anand 388120, Gujarat, India

[2] Sardar Patel Univ, Dept Phys, Anand 388120, Gujarat, India

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2015年 / 206卷

关键词：

Indium tin oxide (ITO); Oxide semiconductors; Volatile organic compounds (VOCs); Benzene (C-6 H-6); Gas/vapour sensors; SEMICONDUCTOR SENSORS; GAS SENSORS; OXIDE; OXIDATION;

D O I：

10.1016/j.snb.2014.07.037

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Benzene being a major pollutant and a potential human carcinogen, development of a sensitive and selective sensor for its detection is the need of the hour. In the present work, the studies on the development of indium tin oxide thin film sensor for detection of benzene are presented. Thin films of indium tin oxide (ITO) were deposited using thermal evaporation technique, and, under the optimized fabrication conditions, sets of sensors were fabricated. Their response to benzene vapours was studied. The sensing mechanism explaining the redox reactions on the surface of ITO has been proposed. The films were coated with thin layers of metals and oxides to enhance the performance for the sensitive and selective detection of benzene. Cross sensitivity of benzene with respect to toluene was studied and selectivity was obtained with a two layered structure of Cr/ITO. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：381 / 388

页数：8

共 33 条

[1] Highly selective GaN-nanowire/TiO2-nanocluster hybrid sensors for detection of benzene and related environment pollutants [J].

Aluri, Geetha S. ;

Motayed, Abhishek ;

Davydov, Albert V. ;

Oleshko, Vladimir P. ;

Bertness, Kris A. ;

Sanford, Norman A. ;

Rao, Mulpuri V. .

NANOTECHNOLOGY, 2011, 22 (29)

[2] ZINC-OXIDE-BASED SEMICONDUCTOR SENSORS FOR DETECTING ACETONE AND CAPRONALDEHYDE IN THE VAPOR OF CONSOMME SOUP [J].

ANNO, Y ;

MAEKAWA, T ;

TAMAKI, J ;

ASANO, Y ;

HAYASHI, K ;

MIURA, N ;

YAMAZOE, N .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) :623-627

[3]

[Anonymous], 2008, 624B CDP U MICH

[4] Chemiresistive sensors of electrically conducting poly(2,5-thienylene vinylene) and copolymers: their responses to nine organic vapours [J].

De Wit, M ;

Vanneste, E ;

Geise, HJ ;

Nagels, LJ .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 50 (02) :164-172

[5] Thermal desorption pre-concentrator based system to assess carbon dioxide contamination by benzene [J].

Duran, C. ;

Vilanova, X. ;

Brezmes, J. ;

Llobet, E. ;

Correig, X. .

SENSORS AND ACTUATORS B-CHEMICAL, 2008, 131 (01) :85-92

[6] Fast gas sensors based on metal oxides which are stable at high temperatures [J].

Fleischer, M ;

Meixner, H .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 43 (1-3) :1-10

[7]

Galkidas A., 1992, THIN SOLID FILMS, V186, P633

[8] Total oxidation of benzene using Cu-Cr mixed oxide as catalyst [J].

Georgescu, Vasile ;

Dobrescu, Gianina ;

Papa, Florica ;

Ionescu, Niculae I. .

REACTION KINETICS AND CATALYSIS LETTERS, 2008, 94 (02) :345-350

[9] Analysis of VOCs with a tin oxide sensor array [J].

Getino, J ;

Horrillo, MC ;

Gutierrez, J ;

Ares, L ;

Robla, JI ;

Garcia, C ;

Sayago, I .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 43 (1-3) :200-205

[10]

Gholami J., 2013, IRANICA J ENERGY ENV, P24

← 1 2 3 4 →