High performance enhancement-mode thin-film transistor with graphene quantum dot-decorated In2O3 channel layers

被引:5
|
作者
Xu, Xiaofen [1 ]
He, Gang [1 ]
Jiang, Shanshan [2 ]
Wang, Leini [1 ]
Wang, Wenhao [1 ]
Liu, Yanmei [1 ]
Gao, Qian [1 ]
机构
[1] Anhui Univ, Sch Mat Sci & Engn, Hefei 230601, Peoples R China
[2] Anhui Univ, Sch Integrat Circuits, Hefei 230601, Peoples R China
基金
中国国家自然科学基金;
关键词
LOW-TEMPERATURE; ELECTRONIC-PROPERTIES; OPTICAL-PROPERTIES; LOW-VOLTAGE; OXIDE; STABILITY; GRAPHITE; AVENUE; BIAS;
D O I
10.1039/d2ra01051h
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Due to the quantum confinement and edge effects, there has been ongoing enthusiasm to provide deep insight into graphene quantum dots (GQDs), serving as attractive semiconductor materials. To demonstrate the potential applications of GQDs in electronic devices, this work presents solution-processed high performance GQD-decorated In2O3 thin-film transistors (TFTs) based on ZrO2 as gate dielectrics. GQDs-In2O3/ZrO2 TFTs with optimized doping content have demonstrated high electrical performance and low operating voltage, including a larger field-effect mobility (mu(FE)) of 34.02 cm(2) V-1 s(-1), a higher I-on/I-off of 4.55 x 10(7), a smaller subthreshold swing (SS) of 0.08 V dec(-1), a lower interfacial trap states (D-it) of 5.84 x 10(11) cm(-2) and threshold voltage shift of 0.07 V and 0.12 V under positive bias stress (PBS) and negative bias stress (NBS) for 3600 s, respectively. As a demonstration of complex logic applications, a resistor-loaded unipolar inverter based on GQDs-In2O3/ZrO2 has been built, demonstrating full swing characteristic and high gain of 10.63. Low-frequency noise (LFN) characteristics of GQDs-In2O3/ZrO2 TFTs have been presented and it was concluded that the noise source can be attributed to the fluctuations in mobility. As a result, it can be concluded that solution-derived GDQ-optimized oxide-based TFTs will manifest potential applications in electronic devices.
引用
收藏
页码:14986 / 14997
页数:12
相关论文
共 50 条
  • [41] Effect of AlN/Al2O3 Thin-Film Protective Layer on the High-Temperature Performance of ITO Thin-Film Strain Gauge
    Li, Shuolin
    Zhang, Lei
    Xie, Hao
    Yao, Xue
    Hao, Zhuya
    Dong, Helei
    Tan, Qiulin
    IEEE SENSORS JOURNAL, 2023, 23 (11) : 11490 - 11497
  • [42] Ultra-High Field-Effect Mobility Thin-Film Transistors With Metal-Organic Chemical Vapor Deposition Grown In2O3 Channel Treated by Oxygen Microwave Plasma
    Hu, R.
    Pei, Y.
    Chen, Z.
    Yang, J.
    Li, Y.
    Lin, J.
    Zhao, Y.
    Wang, C.
    Liang, J.
    Fan, B.
    Wang, G.
    IEEE ELECTRON DEVICE LETTERS, 2015, 36 (11) : 1163 - 1165
  • [43] Water adsorption effects of nitrate ion coordinated Al2O3 dielectric for high performance metal-oxide thin-film transistor
    Park, Jee Ho
    Kim, Kyongjun
    Yoo, Young Bum
    Park, Si Yun
    Lim, Keon-Hee
    Lee, Keun Ho
    Baik, Hong Koo
    Kim, Youn Sang
    JOURNAL OF MATERIALS CHEMISTRY C, 2013, 1 (43) : 7166 - 7174
  • [44] Enhancement-Mode Metal Organic Chemical Vapor Deposition-Grown ZnO Thin-Film Transistors on Glass Substrates Using N2O Plasma Treatment
    Remashan, Kariyadan
    Choi, Yong-Seok
    Kang, Se-Koo
    Bae, Jeong-Woon
    Yeom, Geun-Young
    Park, Seong-Ju
    Jang, Jae-Hyung
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)
  • [45] Realization of tunable-performance in atomic layer deposited Hf-doped In2O3 thin film transistor via oxygen vacancy modulation
    Zhu, Jiyuan
    Hu, Shen
    Chen, Bojia
    Wei, Shice
    Zhang, Yu
    Wu, Xuefeng
    Zou, Xingli
    Lu, Xionggang
    Sun, Qingqing
    Zhang, David W.
    Ji, Li
    JOURNAL OF CHEMICAL PHYSICS, 2024, 160 (04)
  • [46] Electrical performance of La-doped In2O3 thin-film transistors prepared using a solution method for low-voltage driving
    Du, Hongguo
    Tuokedaerhan, Kamale
    Zhang, Renjia
    RSC ADVANCES, 2024, 14 (22) : 15483 - 15490
  • [47] Nano-Scale Ga2O3 Interface Engineering for High-Performance of ZnO-Based Thin-Film Transistors
    Bukke, Ravindra Naik
    Mude, Narendra Naik
    Bae, Jinbaek
    Jang, Jin
    ACS APPLIED MATERIALS & INTERFACES, 2022, 14 (36) : 41508 - 41519
  • [48] High-temperature protection performance of Mg-doped Al2O3 2 O 3 protective layers on the thin film thermocouples
    Sun, Ningkai
    Jiang, Hongchuan
    Zhao, Xiaohui
    Deng, Xinwu
    Zhang, Wanli
    CERAMICS INTERNATIONAL, 2024, 50 (19) : 36537 - 36543
  • [49] 0.6V Threshold Voltage Thin Film Transistors With Solution Processable Indium Oxide (In2O3) Channel and Anodized High-κ Al2O3 Dielectric
    Bhalerao, Sagar R.
    Lupo, Donald
    Zangiabadi, Amirali
    Kymissis, Ioannis
    Leppaniemi, Jaakko
    Alastalo, Ari
    Berger, Paul R.
    IEEE ELECTRON DEVICE LETTERS, 2019, 40 (07) : 1112 - 1115
  • [50] High-performance IGZO/Ga2O3 dual-active-layer thin film transistor for deep UV detection
    Han, Zuyin
    Song, Shuang
    Liang, Huili
    Shao, Hang
    Hu, Sigui
    Wang, Yan
    Wang, Jiwei
    Mei, Zengxia
    APPLIED PHYSICS LETTERS, 2022, 120 (26)