Ultrasensitive nanomechanical photonic sensor based on horizontal slot-waveguide resonator

被引：36

作者：

Angulo Barrios, Carlos ^{[1
]}

机构：

[1] Univ Politecn Madrid, ETSI Telecommun, Inst Sist Optoelect & Microtecnol, E-28040 Madrid, Spain

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2006年 / 18卷 / 21-24期

关键词：

integrated optics; microoptoelectromechanical systems; sensors; silicon technology;

D O I：

10.1109/LPT.2006.886824

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel integrated nanomechanical optical sensor with ultrahigh sensitivity is presented. The photonic device consists of a silicon-based disk resonator formed by a horizontal slot-waveguide acting as a circular cantilever. The overall sensitivity results from the product of the sensitivities of the slot-waveguide and the disk resonator. Calculations indicate a sensitivity as high as 33 nm(-1), which is four orders of magnitude larger than that of state-of-the-art microcantilever sensors.

引用

页码：2419 / 2421

页数：3

共 9 条

[1] Guiding and confining light in void nanostructure [J].

Almeida, VR ;

Xu, QF ;

Barrios, CA ;

Lipson, M .

OPTICS LETTERS, 2004, 29 (11) :1209-1211

[2] Electrically driven silicon resonant light emitting device based on slot- waveguide [J].

Barrios, CA ;

Lipson, M .

OPTICS EXPRESS, 2005, 13 (25) :10092-10101

[3] Beyond the Rayleigh scattering limit in high-Q silicon microdisks:: theory and experiment [J].

Borselli, M ;

Johnson, TJ ;

Painter, O .

OPTICS EXPRESS, 2005, 13 (05) :1515-1530

[4] Sensitive disk resonator photonic biosensor [J].

Boyd, RW ;

Heebner, JE .

APPLIED OPTICS, 2001, 40 (31) :5742-5747

[5] Full-field wafer level thin film stress measurement by phase-stepping shadow Moire [J].

Chen, KS ;

Chen, TYF ;

Chuang, CC ;

Lin, IK .

IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, 2004, 27 (03) :594-601

[6] Design and analysis of an integrated optical sensor for scanning force microscopies [J].

Kocabas, C ;

Aydinli, A .

IEEE SENSORS JOURNAL, 2005, 5 (03) :411-418

[7] Cantilever array sensors [J].

Lang, Hans Peter ;

Hegner, Martin ;

Gerber, Christoph .

MATERIALS TODAY, 2005, 8 (04) :30-36

[8] Optical sensing of biomolecules using microring resonators [J].

Yalçin, A ;

Popat, KC ;

Aldridge, JC ;

Desai, TA ;

Hryniewicz, J ;

Chbouki, N ;

Little, BE ;

King, O ;

Van, V ;

Chu, S ;

Gill, D ;

Anthes-Washburn, M ;

Ünlü, MS .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2006, 12 (01) :148-155

[9] A novel optical waveguide microcantilever sensor for the detection of nanomechanical forces [J].

Zinoviev, K ;

Dominguez, C ;

Plaza, JA ;

Busto, VJC ;

Lechuga, LM .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2006, 24 (05) :2132-2138

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