Spin-on-glass (SOG) for the trilayer imaging process

被引：3

作者：

Sugita, H ^{[1
]}

Saito, A ^{[1
]}

Konno, K ^{[1
]}

Hayasui, A ^{[1
]}

Nishiyama, S ^{[1
]}

Ebisawa, M ^{[1
]}

Nishikawa, M ^{[1
]}

Ohta, Y ^{[1
]}

Tominaga, T ^{[1
]}

机构：

[1] JSR Corp, Fine Elect Res Lab, Yokaichi, Mie 5108552, Japan

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 2003年 / 88卷 / 03期

关键词：

spin-on-glass; sol-gel; trilayer imaging process; lithography;

D O I：

10.1002/app.11582

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

Maleic acid catalyzed hydrolysis and condensation of tetramethoxysilane was carried out in 1-propoxy-2-propanol to prepare a spin-on-glass (SOG) material for the trilayer imaging process. The material was found to be stable enough for industry use. Minor amounts of methylsilsesquioxane and photoacid generators were introduced into the material. Thin resist (top layer) patterns were imaged on the SOG film (intermediate layer), which was coated on a hard-baked i-line resist (bottom layer). The SOG film showed sufficient adhesion to the resist patterns, and superior resist profiles were imaged on the film. (C) 2003 Wiley Periodicals, Inc.

引用

页码：636 / 640

页数：5

共 25 条

[21] Preparation and Properties of Sol-Gel Coating Films
Sakka, Sumio
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1994, 2 (1-3) : 451 - 455
[22] Hydrolysis rates of TMOS catalyzed by oxalic acid and stimulated by ultrasound
Vollet, DR
Donatti, DA
Ruiz, AI
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1999, 15 (01) : 5 - 11
[23] SOL-GEL TRANSITION IN THE HYDROLYSIS OF SILICON METHOXIDE
YAMANE, M
INOUE, S
YASUMORI, A
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 63 (1-2) : 13 - 21
[24] Hydrolysis and polymerization of dimethyldiethoxysilane, methyltrimethoxysilane and tetramethoxysilane in presence of aluminum acetylacetonate. A complex catalyst for the formation of siloxanes
Zhang, ZY
Sakka, S
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1999, 16 (03) : 209 - 220
[25] Preparation of CH3SiO3/2 film from methyltriethoxysilane
Zhang, ZY
Tanigami, Y
Terai, R
[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1996, 6 (03) : 273 - 278

← 1 2 3 →