Optical Properties of Carbon Films Obtained by Plasma-Enhanced Chemical Vapor Deposition

被引：0

作者：

Sha, Bo ^{[1
]}

Lukianov, Anatolii ^{[1
,2
]}

Klyui, Mykola ^{[1
,2
]}

Dusheiko, Mykhailo ^{[3
]}

Kasatkin, Vladislav ^{[2
]}

Lozinskii, Volodymyr ^{[2
]}

Yakymenko, Yuriy ^{[3
]}

机构：

[1] Jilin Univ, Coll Phys, Cangchun, Peoples R China

[2] V Lashkaryov Inst Semicond Phys NAS Ukraine, Kiev, Ukraine

[3] Natl Tech Univ Ukraine, Igor Sikorsky Kyiv Polytech Inst, Kiev, Ukraine

来源：

2019 IEEE 39TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO) | 2019年

关键词：

diamond-like carbon; PECVD; optical properties; optical bandgap; DIAMOND-LIKE CARBON; MECHANICAL-PROPERTIES; ANTIREFLECTION; COATINGS;

D O I：

10.1109/elnano.2019.8783283

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The series of diamond-like carbon films was fabricated using Plasma-Enhanced Chemical Vapor Deposition (PECVD) setup designed for deposition of amorphous silicon films. The deposited films were analyzed in terms of optical properties. The limitations of the deposition parameters were found. The set of deposition parameters for carbon film deposition with suitable optical properties was proposed. It was established that by changing of the main PE-CVD parameters the DLC films having low and intermediate refractive indices may be obtained. In combination with high optical bandgap and low extinction coefficient it makes possible to apply the DLC films as antireflection and passivation layers for solar cells and IR optical elements.

引用

页码：365 / 368

页数：4

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