Particle-size analysis by laser diffraction with a complementary metal-oxide semiconductor pixel array

Existing laser-diffraction instruments that use photodiode detectors have a limited resolution for particle sizing. We attempt the implementation of a complementary metal-oxide semiconductor pixel sensor for particle-size measurement by laser diffraction. The sensor has unique features: high resolution, no blooming, and a wide dynamic range (i.e., direct measurement of the scattering pattern). The calibration of the sensor is based on each pixel. The signal-processing and the inversion schemes for obtaining the I;article-size distribution are described. The results indicate an improved size resolution and an increased flexibility of application. (C) 2000 Optical Society of America OCIS cooles: 040.1240, 050.1960, 100.2000, 140.3460, 120.1880.