Quantum wires and quantum dots on high-index substrates

被引:6
|
作者
Nötzel, R [1 ]
Ploog, KH [1 ]
机构
[1] Paul Drude Inst Soild State Elect, D-10117 Berlin, Germany
来源
PHYSICA E | 2000年 / 8卷 / 02期
关键词
III-V semiconductors; patterned growth; quantum wires; quantum dots;
D O I
10.1016/S1386-9477(00)00127-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The unique self-organizing growth mechanisms on planar and patterned high-index substrates leading to quantum wire and quantum dot arrays with unprecedented structural and electronic properties are reviewed. On not intentionally patterned substrates these are nanometer-scale self-faceting in molecular-beam epitaxy (MBE) and metalorganic-vapor-phase epitaxy (MOVPE), most prominent for GaAs (3 1 1)A planes, and the formation of buried (InGa)As quantum disks on GaAs (3 1 1)B substrates in MOVPE. On intentionally patterned GaAs (3 1 1)A substrates the self-limiting formation of a fast growing mesa sidewall in MBE is highlighted which reveals a high flexibility for the fabrication of dense arrays of quantum wires, dot-like nanostructures, and coupled wire-dot arrays with superior control of nanostructure size and position. A new dimension in nanostructure formation is introduced by combining natural self-faceting on GaAs (3 1 1)A substrates with patterned growth in atomic hydrogen assisted MBE producing quantum-dot arrays with minimized size fluctuations. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:117 / 124
页数:8
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