Analysis of an Electrostatically Actuated MEMS Drop Ejector

被引：0

作者：

Furlani, E. P. ^{[1
]}

Carter, M. C. ^{[2
]}

机构：

[1] Eastman Kodak Co, Kodak Res Labs, 1999 Lake Ave, Rochester, NY 14650 USA

[2] Flow Sci Inc, Santa Fe, NM 87505 USA

来源：

NANOTECH CONFERENCE & EXPO 2009, VOL 3, TECHNICAL PROCEEDINGS: NANOTECHNOLOGY 2009: BIOFUELS, RENEWABLE ENERGY, COATINGS FLUIDICS AND COMPACT MODELING | 2009年

关键词：

Microfluidics; MEMS; squeeze film analysis; microdrop ejection; drop-on-demand;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

We present an analysis of ail electrostatic-based MEMS drop ejector. The ejector consists of a microfluidic chamber with a piston that is Suspended a few micrometers beneath a nozzle plate. A drop is ejected when the piston is electrostatically driven toward the orifice. We discuss the operating physics of the ejector, and present a lumped-element model for predicting its performance. We compare the analytical predictions with CFD analysis.

引用

页码：521 / +

页数：2