Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites

被引：12
作者：
Miao, Fengjuan [1 ,2 ,3 ]
Tao, Bairui [1 ,2 ,3 ]
Sun, Li [1 ,2 ]
Liu, Tao [1 ,2 ]
You, Jinchuan [1 ,2 ]
Wang, Lianwei [1 ,2 ]
Chu, Paul K. [4 ]
机构：
[1] E China Normal Univ, Minist Educ, Lab Polar Mat & Devices, Shanghai 200241, Peoples R China
[2] E China Normal Univ, Dept Elect Engn, Shanghai 200241, Peoples R China
[3] Qiqihar Univ, Coll Commun & Elect Engn, Qiqihar Heilongjiang 161006, Peoples R China
[4] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2010年 / 160卷 / 1-2期
关键词：
Humidity sensors; Nanostructures; Ni/Si-MCP; Electroless plating; POROUS SILICON; DEPOSITION; SENSORS; HYSTERESIS; NANOWIRE; SURFACE; NICKEL; SYSTEM;
D O I：
10.1016/j.sna.2010.03.010
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macro-porous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP for the detection of humidity. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. Our results show that the Ni/Si-MCP nanocomposites have high sensitivity and fast response time. They are compatible with current IC processes and have promising applications as integrated micro humidity sensors. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：48 / 53
页数：6
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