Basic characteristics of Ar/N2 atmospheric pressure nonequilibrium microwave discharge plasma jets

To understand the mechanism of surface processing by atmospheric pressure nonequilibrium microwave discharge plasma jets of coaxial type without a resonator, we measured the vibrational and rotational temperatures in plasmas using optical emission spectroscopy. The plasma was excited by a microwave power supply, using a gas mixture of Ar and N-2 as the plasma gas, and changing the flow rate of N2 gas. We also measured the change in the contact angle of a PET film before and after the plasma processing. It decreased as the plasma rotational temperature increased, indicating that the hydrophilicity of the PET surface was improved as the plasma rotational temperature became higher. (c) 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.