Large-scale synthesis of aligned carbon nanotubes by surface-wave-excited microwave-plasma-enhanced chemical vapor deposition

被引：4
|
作者：
Hayashi, H [1 ]
Koga, M [1 ]
Kashirajima, J [1 ]
Takahashi, K [1 ]
Hayashi, Y [1 ]
Nishino, S [1 ]
机构：
[1] Kyoto Inst Technol, Dept Elect & Informat Sci, Sakyo Ku, Kyoto 6068585, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2002年 / 41卷 / 12B期
关键词：
carbon nanotubes; surface-wave-excited microwave plasma; CVD; slot antenna; electron field emission;
D O I：
10.1143/JJAP.41.L1488
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new synthesis method of aligned carbon nanotubes on large substrates by surface-wave-excited microwave-plasma chemical vapor deposition (CVD) using slot antennas has been developed. Under the optimized conditions, well-aligned, high-density, uniform carbon nanotubes were successfully synthesized on the entire surface of a 3 x 3 cm 2 substrate by a one-slot antenna system. The practical value of an electron field emission density of more than 1 mA/cm(2) was obtained at -650 V. For large-scale synthesis of carbon nanotubes, we generated uniform surface-wave-excited microwave plasma of 12 cm diameter by a two-slot antenna system and confirmed the growth of carbon nanotubes in a preliminary experiment.
引用
收藏
页码：L1488 / L1491
页数：4
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