共 98 条
[5]
Energy analysis of hyperthermal hydrogen atoms generated through surface neutralisation of ions
[J].
EUROPHYSICS LETTERS,
2005, 72 (02)
:235-241
[7]
Pulsed bias magnetron sputtering of thin films on insulators
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1999, 17 (06)
:3322-3326
[8]
Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor
[J].
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,
2015, 212 (11)
:2611-2615