共 18 条
Effects of impurities on void formation at the interface between Sn-3.0Ag-0.5Cu and Cu electroplated films
被引:9
作者:

Chiang, Ping-Chen
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

论文数: 引用数:
h-index:
机构:

Chen, Chih-Ming
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
Natl Chung Hsing Univ, Innovat & Dev Ctr Sustainable Agr IDCSA, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
机构:
[1] Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
[2] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan
[3] Natl Chung Hsing Univ, Innovat & Dev Ctr Sustainable Agr IDCSA, Taichung 402, Taiwan
关键词:
D O I:
10.1007/s10854-021-05824-7
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Void formation is a critical reliability concern for solder joints in electronic packaging. The control of microstructures and the quantity of impurities in Cu electroplated films significantly affect void formation at the joint interface, but studies investigating these factors are rare. In this study, three Cu films (denoted as A, B, and C) are fabricated using an electroplating process. The Cu A film has a faceted grain texture embedded with twin boundaries, while Cu B and C films have similar columnar textures. After thermal aging at 200 degrees C for 1000 h, the SAC 305 (Sn-3.0Ag-0.5Cu) solder joints with Cu A and B films exhibit robust interfacial structures without voids. However, microstructural collapse is observed in the solder joint of SAC 305/Cu C, where many crevices are formed parallel to the interface. Based on the microanalysis, the concentration of impurities is higher in Cu C than in Cu A and B. Moreover, discrete voids rather than continuous crevices are present in the SAC305/Cu C system when the impurity concentration in Cu C is reduced. The findings demonstrate that impurity control in Cu electroplated film is critical for the control of void/crevice formation in electronic solder joints.
引用
收藏
页码:11944 / 11951
页数:8
相关论文
共 18 条
[1]
Effect of Copper Grain Size on the Interfacial Microstructure of a Sn/Cu Joint
[J].
Chan, Po-Fan
;
Lee, Hsuan
;
Wen, Shih-, I
;
Hung, Mao-Chun
;
Chen, Chih-Ming
;
Dow, Wei-Ping
.
ACS APPLIED ELECTRONIC MATERIALS,
2020, 2 (02)
:464-472

Chan, Po-Fan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Taichung, Taiwan Natl Chung Hsing Univ, Taichung, Taiwan

Lee, Hsuan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Taichung, Taiwan Natl Chung Hsing Univ, Taichung, Taiwan

Wen, Shih-, I
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Taichung, Taiwan Natl Chung Hsing Univ, Taichung, Taiwan

Hung, Mao-Chun
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Taichung, Taiwan Natl Chung Hsing Univ, Taichung, Taiwan

Chen, Chih-Ming
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Taichung, Taiwan Natl Chung Hsing Univ, Taichung, Taiwan

Dow, Wei-Ping
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Taichung, Taiwan Natl Chung Hsing Univ, Taichung, Taiwan
[2]
Electrodeposition of Twinned Cu with Strong Texture Effect on Voiding Propensity in Electroplated Cu Solder Joints
[J].
Chiang, Ping-Chen
;
Shen, Yu-An
;
Feng, Shien-Ping
;
Chen, Chih-Ming
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
2020, 167 (16)

Chiang, Ping-Chen
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

论文数: 引用数:
h-index:
机构:

Feng, Shien-Ping
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Hong Kong, Dept Mech Engn, Hong Kong, Peoples R China Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Chen, Chih-Ming
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
Natl Chung Hsing Univ, Innovat & Dev Ctr Sustainable Agr IDCSA, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
[3]
Formation of nearly void-free Cu3Sn intermetallic joints using nanotwinned Cu metallization
[J].
Chiu, Wei-Lan
;
Liu, Chien-Min
;
Haung, Yi-Sa
;
Chen, Chih
.
APPLIED PHYSICS LETTERS,
2014, 104 (17)

Chiu, Wei-Lan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Liu, Chien-Min
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Haung, Yi-Sa
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

论文数: 引用数:
h-index:
机构:
[4]
Effect of Sn grain orientation and strain distribution in 20-μm-diameter microbumps on crack formation under thermal cycling tests
[J].
Chu, Yi-Cheng
;
Chen, Chih
;
Kao, Nicholas
;
Jiang, Don Son
.
ELECTRONIC MATERIALS LETTERS,
2017, 13 (06)
:457-462

Chu, Yi-Cheng
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

论文数: 引用数:
h-index:
机构:

Kao, Nicholas
论文数: 0 引用数: 0
h-index: 0
机构:
Siliconware Precis Ind Co Ltd, Mat Engineer Div, Engn Ctr, Taichung 427, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Jiang, Don Son
论文数: 0 引用数: 0
h-index: 0
机构:
Siliconware Precis Ind Co Ltd, Mat Engineer Div, Engn Ctr, Taichung 427, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[5]
Unidirectional Growth of Microbumps on (111)-Oriented and Nanotwinned Copper
[J].
Hsiao, Hsiang-Yao
;
Liu, Chien-Min
;
Lin, Han-Wen
;
Liu, Tao-Chi
;
Lu, Chia-Ling
;
Huang, Yi-Sa
;
Chen, Chih
;
Tu, K. N.
.
SCIENCE,
2012, 336 (6084)
:1007-1010

Hsiao, Hsiang-Yao
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Liu, Chien-Min
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Lin, Han-Wen
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Liu, Tao-Chi
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Lu, Chia-Ling
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Huang, Yi-Sa
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

论文数: 引用数:
h-index:
机构:

Tu, K. N.
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[6]
Copper-to-copper direct bonding on highly (111)-oriented nanotwinned copper in no-vacuum ambient
[J].
Juang, Jing-Ye
;
Lu, Chia-Ling
;
Chen, Kuan-Ju
;
Chen, Chao-Chang A.
;
Hsu, Po-Ning
;
Chen, Chih
;
Tu, K. N.
.
SCIENTIFIC REPORTS,
2018, 8

Juang, Jing-Ye
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Lu, Chia-Ling
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Chen, Kuan-Ju
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Chen, Chao-Chang A.
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei 10607, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Hsu, Po-Ning
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

论文数: 引用数:
h-index:
机构:

Tu, K. N.
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[7]
Influence of additives on electroplated copper films and their solder joints
[J].
Lee, Hsuan
;
Tsai, Shan-Ting
;
Wu, Ping-Heng
;
Dow, Wei-Ping
;
Chen, Chih-Ming
.
MATERIALS CHARACTERIZATION,
2019, 147
:57-63

Lee, Hsuan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Tsai, Shan-Ting
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Wu, Ping-Heng
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Dow, Wei-Ping
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Chen, Chih-Ming
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
Natl Chung Hsing Univ, IDCSA, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
[8]
Development of nanotwins in electroplated copper and its effect on shear strength of tin/copper joint
[J].
Lee, Hsuan
;
Wang, Yi-An
;
Chen, Chih-Ming
.
JOURNAL OF ALLOYS AND COMPOUNDS,
2018, 765
:335-342

Lee, Hsuan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Wang, Yi-An
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Chen, Chih-Ming
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
[9]
Impurity Incorporation in the Cu Electrodeposit and Its Effects on the Microstructural Evolution of the Sn/Cu Solder Joints
[J].
Lee, Hsuan
;
Yu, Tai-Yi
;
Cheng, Hsi-Kuei
;
Liu, Kuo-Chio
;
Chan, Po-Fan
;
Dow, Wei-Ping
;
Chen, Chih-Ming
.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
2017, 164 (07)
:D457-D462

Lee, Hsuan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Yu, Tai-Yi
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Cheng, Hsi-Kuei
论文数: 0 引用数: 0
h-index: 0
机构:
Taiwan Semicond Mfg Co Ltd, Backend Operat Div, Taichung, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Liu, Kuo-Chio
论文数: 0 引用数: 0
h-index: 0
机构:
Taiwan Semicond Mfg Co Ltd, Backend Operat Div, Taichung, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Chan, Po-Fan
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Dow, Wei-Ping
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan

Chen, Chih-Ming
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan Natl Chung Hsing Univ, Dept Chem Engn, Taichung 402, Taiwan
[10]
Low-temperature direct copper-to-copper bonding enabled by creep on (111) surfaces of nanotwinned Cu
[J].
Liu, Chien-Min
;
Lin, Han-Wen
;
Huang, Yi-Sa
;
Chu, Yi-Cheng
;
Chen, Chih
;
Lyu, Dian-Rong
;
Chen, Kuan-Neng
;
Tu, King-Ning
.
SCIENTIFIC REPORTS,
2015, 5

Liu, Chien-Min
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Lin, Han-Wen
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Huang, Yi-Sa
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Chu, Yi-Cheng
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

论文数: 引用数:
h-index:
机构:

Lyu, Dian-Rong
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Chen, Kuan-Neng
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30010, Taiwan Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

Tu, King-Ning
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan