Ferroelectric Barium Titanate for Mid-Infrared Integrated Photonics

被引：0
作者：
Jin, Tiening
Li, Leigang
Wang, Haiyan
Pao Tai Lin
机构：
来源：
2017 IEEE 17TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2017年
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暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Mid-Infrared (mid-IR) photonic using barium titanate (BaTiO3) thin films are demonstrated through the complementary metal oxide semiconductor (CMOS) process. The BaTiO3 thin films have broad infrared transmittance between lambda = 2.5 mu m to lambda = 7 um. Our waveguides show a fundamental mode over broad mid-IR regime. With the broad mid-IR transparency and electro-optic (E-O) property, our BaTiO3 platform will enable mid-IR microphotonics that is desired for high-speed optical circuits.
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页码：569 / 571
页数：3
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