Influence of the chemical composition in SiNx films on silver paste contact formation at silicon surface

被引：8
作者：
Chen, X. Y. [1 ]
Xue, W. J. [1 ]
Ban, W. Z. [1 ]
Jiang, X. L. [1 ]
Shan, W. [1 ]
机构：
[1] JA Solar, Cell R&D Ctr, Yangzhou 225000, Jiangsu, Peoples R China
来源：
SOLAR ENERGY | 2016年 / 126卷
关键词：
Silicon nitride; Contact resistance; Ag paste; Glass frits; SOLAR-CELLS; VAPOR-DEPOSITION; GLASS FRIT; ELECTRONIC-STRUCTURE; NITRIDE FILMS; AG CONTACTS; INTERFACE;
D O I：
10.1016/j.solener.2016.01.001
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
We have studied the contact formation of silver (Ag) paste at the silicon surface as a function of chemical composition of silicon nitride films (SiNx) on the front side of crystalline Si solar cell. By tuning silicon (Si) to nitrogen (N) atomic ratio in the SiNx films deposited by PECVD, the contact resistance between Ag paste and Si surface was observed to decrease from N-rich to Si-rich condition then increase again as the chemical composition further into Si-rich. Microstructure analysis via scanning electron microscopy (SEM) imaging revealed the number and diameter of Ag particles embedded in frits are found to be responsible for the behavior of contact resistance. On the other hand, limited number of Ag crystallites on Si surface is also affecting the contact resistance on the highly Si-rich regime. We suggested SiNx films affected silver paste contact formation by modifying chemical composition and properties of interfacial frits. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码：105 / 110
页数：6
相关论文
共 24 条
[1]   Silver thick-film contacts on highly doped n-type silicon emitters:: Structural and electronic properties of the interface [J].
Ballif, C ;
Huljic, DM ;
Willeke, G ;
Hessler-Wyser, A .
APPLIED PHYSICS LETTERS, 2003, 82 (12) :1878-1880
[2]   Influence of Surface Topography on the Glass Coverage in the Contact Formation of Silver Screen-Printed Si Solar Cells [J].
Cabrera, Enrique ;
Olibet, Sara ;
Rudolph, Dominik ;
Wefringhaus, Eckard ;
Kopecek, Radovan ;
Reinke, Daniel ;
Schubert, Gunnar .
IEEE JOURNAL OF PHOTOVOLTAICS, 2013, 3 (01) :102-107
[3]   Experimental evidence of direct contact formation for the current transport in silver thick film metallized silicon emitters [J].
Cabrera, Enrique ;
Olibet, Sara ;
Glatz-Reichenbach, Joachim ;
Kopecek, Radovan ;
Reinke, Daniel ;
Schubert, Gunnar .
JOURNAL OF APPLIED PHYSICS, 2011, 110 (11)
[4]   Role of the ambient oxygen on the silver thick-film contact formation for crystalline silicon solar cells [J].
Cho, Sung-Bin ;
Hong, Kyoung-Kook ;
Huh, Joo-Youl ;
Park, Hyun Jung ;
Jeong, Ji-Weon .
CURRENT APPLIED PHYSICS, 2010, 10 :S222-S225
[5]   Influence of oxygen on Ag ionization in molten lead borosilicate glass during screen-printed Ag contact formation for Si solar cells [J].
Chung, Bo-Mook ;
Cho, Sung-Bin ;
Chun, Jung-Woo ;
Kim, Young-Sik ;
Okamoto, Kuninori ;
Huh, Joo-Youl .
ELECTROCHIMICA ACTA, 2013, 106 :333-341
[6]   Density, surface tension, and viscosity of PbO-B2O3-SiO2 glass melts [J].
Fujino, S ;
Hwang, CW ;
Morinaga, K .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2004, 87 (01) :10-16
[7]   BOND DENSITIES AND ELECTRONIC-STRUCTURE OF AMORPHOUS SINX-H [J].
GURAYA, MM ;
ASCOLANI, H ;
ZAMPIERI, G ;
CISNEROS, JI ;
DASILVA, JHD ;
CANTAO, MP .
PHYSICAL REVIEW B, 1990, 42 (09) :5677-5684
[8]   Effect of Ag particle size in thick-film Ag paste on the electrical and physical properties of screen printed contacts and silicon solar cells [J].
Hilali, MM ;
Nakayashiki, K ;
Khadilkar, C ;
Reedy, RC ;
Rohatgi, A ;
Shaikh, A ;
Kim, S ;
Sridharan, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (01) :A5-A11
[9]   Understanding the formation and temperature dependence of thick-film Ag contacts on high-sheet-resistance Si emitters for solar cells [J].
Hilali, MM ;
Al Jassim, MM ;
To, B ;
Moutinho, H ;
Rohatgi, A ;
Asher, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2005, 152 (10) :G742-G749
[10]   Effect of glass frit chemistry on the physical and electrical properties of thick-film Ag contacts for silicon solar cells [J].
Hilali, Mohamed M. ;
Sridharan, Srinivasan ;
Khadilkar, Chandra ;
Shaikh, Aziz ;
Rohatgi, Ajeet ;
Kim, Steve .
JOURNAL OF ELECTRONIC MATERIALS, 2006, 35 (11) :2041-2047
123