Light emission from the cathode zone of DC glow discharge

被引:1
|
作者
Wronski, Z [1 ]
机构
[1] Marie Curie Sklodowska Univ, Inst Phys, PL-20031 Lublin, Poland
关键词
glow discharge; plasma sputtering; plasma spectroscopy;
D O I
10.1016/S0042-207X(02)00667-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The space close to a cathode of a low-pressure glow discharge (similar to15 Pa) is a reservoir of sputtered atoms. in the gaseous phase and that seems to be an effective source of optical lines of buffer gas as well as those of sputtered solid. The dependence of line intensity on discharge parameters (gas pressure, current density) are well qualitatively explained by the phenomenological modelling, where characteristics (e.g. cross sections of particle-particle and particle-solid interaction, energy spectra of fast heavy molecules) of fundamental processes are taken into account for both buffer gas and sputtered species. Agreement of experimental results with those of modelling allows to conclude that fast heavy molecule-buffer gas or sputtered material interaction is the main excitation channel. Excitation in the cathode solid and non-radiative electron transfer seem to be second-rate processes affecting the sputtered material luminescence. (C) 2003 Elsevier Science Ltd. All rights reserved.
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页码:339 / 345
页数:7
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