Ultra-Efficient Silicon-on-Insulator Grating Couplers With Backside Metal Mirrors

被引：43

作者：

Hoppe, Niklas ^{[1
]}

Zaoui, Wissem Sfar ^{[2
]}

Rathgeber, Lotte ^{[1
]}

Wang, Yun ^{[1
]}

Klenk, Rouven H. ^{[1
]}

Vogel, Wolfgang ^{[1
]}

Kaschel, Mathias ^{[3
]}

Portalupi, Simone Luca ^{[4
,5
]}

Burghartz, Joachim ^{[3
]}

Berroth, Manfred ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Elect & Opt Commun Engn, D-70569 Stuttgart, Germany

[2] AP Sensing GmbH, D-71034 Boblingen, Germany

[3] Inst Mikroelekt Stuttgart IMS CHIPS, D-70569 Stuttgart, Germany

[4] Univ Stuttgart, Inst Halbleiteropt & Funkt Grenzflachen, Ctr Integrated Quantum Sci & Technol, D-70569 Stuttgart, Germany

[5] Univ Stuttgart, SCoPE, D-70569 Stuttgart, Germany

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2020年 / 26卷 / 02期

关键词：

Crating coupler; silicon photonics; WIDE BANDWIDTH; FIBER;

D O I：

10.1109/JSTQE.2019.2935296

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Coupling of light from off-chip into highly complex silicon-based devices is currently focus of efforts and research. In this work, the experimental demonstration of a -0.50 dB (89%) coupling efficiency in the C-band with the help of an aperiodic grating coupler design in a 250 nm silicon-on-insulator (SOI) technology is shown. Further, this work reports about the latest results regarding focusing grating couplers with footprints of only 30 mu m x 30 mu m and a measured coupling efficiency of up to -0.93 dB (81%) at 1549 nm. Efficient grating coupler arrays are realized by using an expanded backside metal mirror-strip for the application of fiber arrays. In addition, this work presents aperiodic silicon grating couplers with an enhanced bandwidth to overcome the limited usability of grating couplers in wavelength division multiplexing (WDM) systems.

引用

页数：6

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