Study of field electron emission phenomenon associated with N-doped amorphous diamond thin films

被引:43
作者
Chen, J
Wei, AX
Deng, SZ
Lu, Y
Zheng, XG
Chen, DH
Mo, D
Peng, SQ
Xu, NS [1 ]
机构
[1] Zhongshan Univ, Dept Phys, Canton 510275, Peoples R China
[2] Chinese Acad Sci, State Key Lab Surface Phys, Beijing 100864, Peoples R China
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 02期
关键词
D O I
10.1116/1.589884
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Experiments have been carried out to study the field electron emission characteristics of nitrogen-doped amorphous diamond thin films prepared by magnetic-field filtered carbon ion deposition. A transparent anode imaging technique is used to record the spatial distribution of individual emission sites and the total emission current-voltage characteristics of the films. Also, the optical and electrical properties of the films having different nitrogen-doping levels have been studied. A correlation has been found to exist between the field-emission characteristics and the band gap of the films; i.e., it is found that the films of relatively small optical band gap have low turn-on fields. (C) 1998 American Vacuum Society. [S0734-211X(98)09102-1].
引用
收藏
页码:697 / 699
页数:3
相关论文
共 14 条
  • [1] AMARATUNGA GAJ, 1993, J NONCRYST SOLIDS, V164, P1119
  • [2] Low field-induced electron emission phenomenon observed from the carbon containing thin films
    Chen, Jun
    Wei, Ai-Xiang
    Zhang, Hai-Yan
    Lu, Yong
    Zheng, Xin-Guo
    Mo, Dang
    Peng, Shao-Qi
    Xu, Ning-Sheng
    [J]. 1997, IOP Publishing Ltd (14):
  • [3] CAPACITANCE-VOLTAGE MEASUREMENTS ON METAL-SIO2-DIAMOND STRUCTURES FABRICATED WITH (100)-ORIENTED AND (111)-ORIENTED SUBSTRATES
    GEIS, MW
    GREGORY, JA
    PATE, BB
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (03) : 619 - 626
  • [4] NOVEL SYNTHETIC ROUTES TO CARBON-NITROGEN THIN-FILMS
    KOUVETAKIS, J
    BANDARI, A
    TODD, M
    WILKENS, B
    CAVE, N
    [J]. CHEMISTRY OF MATERIALS, 1994, 6 (06) : 811 - 814
  • [5] LATHAM RV, 1986, J PHYS D, V19, P214
  • [6] INFRARED-ABSORPTION AND NUCLEAR-MAGNETIC-RESONANCE STUDIES OF CARBON NITRIDE THIN-FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING
    LI, D
    CHUNG, YW
    YANG, ST
    WONG, MS
    ADIBI, F
    SPROUL, WD
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (04): : 1470 - 1473
  • [7] Low-threshold cold cathodes made of nitrogen-doped chemical-vapour-deposited diamond
    Okano, K
    Koizumi, S
    Silva, SRP
    Amaratunga, GAJ
    [J]. NATURE, 1996, 381 (6578) : 140 - 141
  • [8] WANG C, 1991, ELECTRON LETT, V27, P459
  • [9] Optical and electrical characteristics of amorphous diamond films
    Wei, AX
    Chen, DH
    Peng, SQ
    Ke, N
    Wong, SP
    [J]. DIAMOND AND RELATED MATERIALS, 1997, 6 (08) : 983 - 986
  • [10] Preparation and properties of highly tetrahedral hydrogenated amorphous carbon
    Weiler, M
    Sattel, S
    Giessen, T
    Jung, K
    Ehrhardt, H
    Veerasamy, VS
    Robertson, J
    [J]. PHYSICAL REVIEW B, 1996, 53 (03) : 1594 - 1608