The Assessment for Sensitivity of a NO2 Gas Sensor with ZnGa2O4/ZnO Core-Shell Nanowires-a Novel Approach

被引:49
作者
Chen, I-Cherng [1 ]
Lin, Shiu-Shiung [2 ]
Lin, Tsao-Jen [3 ]
Hsu, Cheng-Liang [4 ]
Hsueh, Ting Jen [5 ]
Shieh, Tien-Yu [2 ]
机构
[1] Ind Technol Res Inst, ITRI S, Micro Syst Technol Ctr, Tainan 709, Taiwan
[2] Kaohsiung Med Univ, Coll Dent Med, Kaohsiung 807, Taiwan
[3] Natl Chung Cheng Univ, Dept Chem Engn, Chiayi 621, Taiwan
[4] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[5] Natl Nano Device Labs, Tainan 741, Taiwan
关键词
ZnGa2O4; ZnO; core shell; nanowire; NO2; gas sensor; sensitivity; SENSING PROPERTIES; THICK-FILM; ZNO NANOWIRES; NITROGEN; OXIDES; FABRICATION; NANORODS; INHALATION; GROWTH;
D O I
10.3390/s100403057
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The application of novel core-shell nanowires composed of ZnGa2O4/ZnO to improve the sensitivity of NO2 gas sensors is demonstrated in this study. The growth of ZnGa2O4/ZnO core-shell nanowires is performed by reactive evaporation on patterned ZnO:Ga/SiO2/Si templates at 600 degrees C. This is to form the homogeneous structure of the sensors investigated in this report to assess their sensitivity in terms of NO2 detection. These novel NO2 gas sensors were evaluated at working temperatures of 25 degrees C and at 250 degrees C, respectively. The result reveals the ZnGa2O4/ZnO core-shell nanowires present a good linear relationship (R-2 > 0.99) between sensitivity and NO2 concentration at both working temperatures. These core-shell nanowire sensors also possess the highest response (<90 s) and recovery (<120 s) values with greater repeatability seen for NO2 sensors at room temperature, unlike traditional sensors that only work effectively at much higher temperatures. The data in this study indicates the newly-developed ZnGa2O4/ZnO core-shell nanowire based sensors are highly promising for industrial applications.
引用
收藏
页码:3057 / 3072
页数:16
相关论文
共 49 条
[1]  
[Anonymous], 1996, CERAMICS SENSORS TEC
[2]   Low temperature selective NO2 sensors by nanostructured fibres of ZnO [J].
Baratto, C ;
Sberveglieri, G ;
Onischuk, A ;
Caruso, B ;
di Stasio, S .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 100 (1-2) :261-265
[3]   Gas-sensing properties of doped In2O3 films as sensors for NO2 in air [J].
Belysheva, TV ;
Bogovtseva, LP ;
Kazachkov, EA ;
Serebryakova, NV .
JOURNAL OF ANALYTICAL CHEMISTRY, 2003, 58 (06) :583-587
[4]   NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporation [J].
Cantalini, C ;
Sun, HT ;
Faccio, M ;
Pelino, M ;
Santucci, S ;
Lozzi, L ;
Passacantando, M .
SENSORS AND ACTUATORS B-CHEMICAL, 1996, 31 (1-2) :81-87
[5]   Gas sensing properties of WO3 thick film for NO2 gas dependent on process condition [J].
Chung, YK ;
Kim, MH ;
Um, WS ;
Lee, HS ;
Song, JK ;
Choi, SC ;
Yi, KM ;
Lee, MJ ;
Chung, KW .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 60 (01) :49-56
[6]   Sputter deposition of tungsten trioxide for gas sensing applications [J].
Di Giulio, M ;
Manno, D ;
Micocci, G ;
Serra, A ;
Tepore, A .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1998, 9 (04) :317-322
[7]   Peculiarities of nitrogen dioxide detection with sprayed undoped and indium-doped zinc oxide thin films [J].
Ferro, R. ;
Rodriguez, J. A. ;
Bertrand, P. .
THIN SOLID FILMS, 2008, 516 (08) :2225-2230
[8]   Development and characterization of a sprayed ZnO thin filmbased NO2 sensor [J].
Ferro, R ;
Rodriguez, JA ;
Bertrand, P .
Physica Status Solidi C - Conference and Critical Reviews, Vol 2, No 10, 2005, 2 (10) :3754-3757
[9]   HIGHER OXIDES OF NITROGEN - INHALATION TOXICOLOGY [J].
GUIDOTTI, TL .
ENVIRONMENTAL RESEARCH, 1978, 15 (03) :443-472
[10]   Hydrogen sensitivity of ZnO p-n homojunctions [J].
Hazra, S. K. ;
Basu, S. .
SENSORS AND ACTUATORS B-CHEMICAL, 2006, 117 (01) :177-182