Characterization of Mixed xWO3(1-x)Y2O3 Nanoparticle Thick Film for Gas Sensing Application

被引：19

作者：

Abadi, M. H. Shahrokh ^{[1
]}

Hamidon, M. N. ^{[1
]}

Shaari, Abdul Halim ^{[2
]}

Abdullah, Norhafizah ^{[3
]}

Misron, Norhisam ^{[1
]}

Wagiran, Rahman ^{[1
]}

机构：

[1] Univ Putra Malaysia, Elect & Elect Dept, Fac Engn, Serdang 43400, Selangor, Malaysia

[2] Univ Putra Malaysia, Dept Phys, Fac Sci, Serdang 43400, Selangor, Malaysia

[3] Univ Putra Malaysia, Dept Chem & Environm, Fac Engn, Serdang 43400, Selangor, Malaysia

来源：

SENSORS | 2010年 / 10卷 / 05期

关键词：

gas sensor; thick film; nano powder; tungsten trioxide; yttrium oxide; PARTICLE-SIZE; SENSORS; HUMIDITY; SNO2;

D O I：

10.3390/s100505074

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Microstructural, topology, inner morphology, and gas-sensitivity of mixed xWO(3)(1-x)Y2O3 nanoparticles (x = 1, 0.95, 0.9, 0.85, 0.8) thick-film semiconductor gas sensors were studied. The surface topography and inner morphological properties of the mixed powder and sensing film were characterized with X-ray diffraction (XRD), atomic force microscopy (AFM), transmission electron microscopy (TEM), and scanning electron microscopy (SEM). Also, gas sensitivity properties of the printed films were evaluated in the presence of methane (CH4) and butane (C4H10) at up to 500 degrees C operating temperature of the sensor. The results show that the doping agent can modify some structural properties and gas sensitivity of the mixed powder.

引用

页码：5074 / 5089

页数：16

共 32 条

[1]

ABADI MHS, 2008, P SEM EL ICSE IEEE I, P334

[2]

ABADI MHS, 2009, SENSORS TRANSDUCERS, V104, P76

[3] Characterization of SnO2-based H-2 gas sensors fabricated by different deposition techniques [J].

Ansari, SG ;

Gosavi, SW ;

Gangal, SA ;

Karekar, RN ;

Aiyer, RC .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1997, 8 (01) :23-27

[4] Structural and gas sensing properties of nanocrystalline TiO2:WO3-based hydrogen sensors [J].

Chaudhari, GN ;

Bende, AM ;

Bodade, AB ;

Patil, SS ;

Sapkal, VS .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 115 (01) :297-302

[5] Ag dopedWO3-based powder sensor for the detection of NO gas in air [J].

Chen, L ;

Tsang, SC .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 89 (1-2) :68-75

[6] Electrical and spectroscopic characterization of SnO2 and Pd-SnO2 thick films studied as CO gas sensors [J].

Chiorino, A ;

Ghiotti, G ;

Carotta, MC ;

Martinelli, G .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 47 (1-3) :205-212

[7]

Czech I, 1996, ICMTS 1996 - 1996 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, PROCEEDINGS, P99, DOI 10.1109/ICMTS.1996.535628

[8] Sputter deposition of tungsten trioxide for gas sensing applications [J].

Di Giulio, M ;

Manno, D ;

Micocci, G ;

Serra, A ;

Tepore, A .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1998, 9 (04) :317-322

[9] Surface state model for conductance responses during thermal-modulation of SnO2-based thick film sensors:: Part I -: Model derivation [J].

Fort, Ada ;

Rocchi, Santina ;

Serrano-Santos, M. Belen ;

Spinicci, Roberto ;

Vignoli, Valerio .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2006, 55 (06) :2102-2106

[10]

IONESCU R, 1996, P INT SEM C CAS IEEE, P489

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