Low-temperature hydrogen sensors based on Au nanoclusters and Schottky contacts on ZnO films deposited by pulsed laser deposition on Si and SiO2 substrates

被引:33
作者
Pandis, Ch. [1 ]
Brilis, N.
Bourithis, E.
Tsamakis, D.
Ali, H.
Krishnamoorthy, Soumya
Iliadis, Agis A.
Kompitsas, M.
机构
[1] Natl Tech Univ Athens, Sch Elect Engn & Comp Sci, Elect Mat Lab, GR-15773 Athens, Greece
[2] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
[3] Univ Aegean, Informat & Commun Syst Engn Dept, Samos 83200, Greece
[4] Natl Hellen Res Fdn, Inst Theoret & Phys Chem, GR-11635 Athens, Greece
关键词
gas detectors; pulsed lasers; Schottky diodes; thin-film devices;
D O I
10.1109/JSEN.2007.891944
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Unintentionally doped n-type ZnO thin films deposited on Si and SiO2 substrates by pulsed laser deposition (PLD) techniques, were functionalized as H-2 gas sensors by a) incorporating An nanoclusters in the surface, and b) developing An Schottky diodes on ZnO. The influence of the catalytic action of the An nanoclusters on the sensing properties of the devices was, examined and found to provide faster response times at a reduced working temperature of 150 degrees C. The field-assisted sensing of the An Schottky diodes demonstrated for the first time in this system, a more dramatic reduction in the working temperature of the sensor to nearly room temperature.
引用
收藏
页码:448 / 454
页数:7
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