Piezoelectric accelerometers for ultrahigh temperature application

被引：113

作者：

Zhang, Shujun ^{[1
]}

Jiang, Xiaoning ^{[2
,3
]}

Lapsley, Michael ^{[2
,4
]}

Moses, Paul ^{[1
]}

Shrout, Thomas R. ^{[1
]}

机构：

[1] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA

[2] TRS Technol Inc, State Coll, PA 16801 USA

[3] N Carolina State Univ, Dept Mech & Aerosp Engn, Raleigh, NC 27695 USA

[4] Penn State Univ, Dept Engn Sci & Mech, University Pk, PA 16802 USA

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 01期

关键词：

accelerometers; calcium compounds; high-temperature techniques; piezoelectric devices; yttrium compounds; THIN-FILM; SENSOR;

D O I：

10.1063/1.3290251

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High temperature sensors are of major importance to aerospace and energy related industries. In this letter, a high temperature monolithic compression-mode piezoelectric accelerometer was fabricated using YCa4O(BO3)(3) (YCOB) single crystals. The performance of the sensor was tested as function of temperature up to 1000 degrees C and over a frequency range of 100-600 Hz. The accelerometer prototype was found to possess sensitivity of 2.4 +/- 0.4 pC/g, across the measured temperature and frequency range, indicating a low temperature coefficient. Furthermore, the sensor exhibited good stability over an extended dwell time at 900 degrees C, demonstrating that YCOB piezoelectric accelerometers are promising candidates for high temperature sensing applications.

引用

页数：3

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