Silicon resonant pressure sensors - A market perspective

被引：0
作者：
Bryzek, J
Mallon, JR
机构：
[1] Maxim Integrated Prod, Intelligent MEMS Prod Grp, Sunnyvale, CA 94086 USA
[2] Measurement Specialties Inc, Fairfield, NJ 07004 USA
来源：
SENSORS AND MATERIALS | 1997年 / 9卷 / 08期
关键词：
micromachining; pressure sensors; vibrating elements; resonant sensors; pressure transducers; MEMS sensors;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We* examine the current state of micromachined, resonant pressure-sensor technology in the context of its historical development with a view towards its potential for commercial success. In this paper we discuss the following topics: characterization of basic resonant elements, overview of the pressure sensor market, comparison of conventional and silicon resonant sensors, review of resonant sensor devices and applications, introduction to silicon resonant sensors, and a proposed strategy for a significant market penetration by resonant sensors.
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收藏
页码：473 / 500
页数：28
相关论文
共 33 条
[1]   OPTICAL MICROMACHINED PRESSURE SENSOR FOR AEROSPACE APPLICATIONS [J].
ANGELIDIS, D ;
PARSONS, P .
OPTICAL ENGINEERING, 1992, 31 (08) :1638-1642
[2]  
ANGELIDIS D, 1994, SENSOR ACTUAT A-PHYS, V43, P85
[3]  
[Anonymous], TRANSDUCERS THEIR EL
[4]  
BRANS O, 1994, MICROMACHINED RESONA
[5]  
BRYZEK J, 1994, P SENSORS EXPO 94
[6]  
BRYZEK J, 1986, P SENSORS EXPO W
[7]  
BRYZEK J, 1996, SILICON SENSORS CIRC, P171
[8]  
BURNS DW, 1994, SOL STAT SENS ACT WO
[9]  
BUSSE D, 1978, AIR DAT S COL SPR CO
[10]  
Chitty G. W., 1988, uS Patent, Patent No. [4,764,244, 4764244]
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