Observation of femtosecond laser-induced ablation in crystalline silicon

被引：13

作者：

Choi, TY ^{[1
]}

Grigoropoulos, CP

机构：

[1] Swiss Fed Inst Technol, Inst Energy Technol, CH-8092 Zurich, Switzerland

[2] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

来源：

JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME | 2004年 / 126卷 / 05期

关键词：

crystalline silicon; pump-and-probe; ultrafast microscopy; plasma;

D O I：

10.1115/1.1795224

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

The ablation of crystalline silicon by ultrashort laser pulses is studied experimentally. A pump-and-probe experiment is implemented in a collinear arrangement, utilizing a time-delayed frequency-doubled probe beam for in situ reflectance measurement and ultrafast microscopy observation. Enhanced surface reflectivity in sub-picosecond time scale at the center of the irradiated spot indicates nonthermal liquid layer formation. A short-lived nonthermal liquid phase was detected at fluence of 1.5 J/cm(2). In addition to this observation, the reflected images for pump beam fluences ranging from 1.5 to 4.6 J/cm(2) provide evidence of plasma expansion above the irradiated target.

引用

页码：723 / 726

页数：4

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