Quantitative Chemical State XPS Analysis of First Row Transition Metals, Oxides and Hydroxides

被引:99
作者
Biesinger, Mark C. [1 ,2 ]
Payne, Brad P. [3 ]
Hart, Brian R. [1 ]
Grosvenor, Andrew P. [4 ]
McIntryre, N. Stewart [3 ]
Lau, Leo W. M. [1 ,3 ]
Smart, Roger St. C. [2 ]
机构
[1] Univ Western Ontario, Western Sci Ctr, Room G1, London, ON N6A 5B7, Canada
[2] Univ South Australia, ACeSSS Appl Ctr Structural & Synchrot Std, Mawson Lakes, SA 5095, Australia
[3] Univ Western Ontario, Dept Chem, London, ON N6A 5B7, Canada
[4] Univ Alberta, Dept Chem, Gunning Lemieux Chem Ctr, Edmonton, AB T6G 2G2, Canada
来源
PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2008年 / 100卷
关键词
D O I
10.1088/1742-6596/100/1/012025
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Practical quantitative chemical state X-ray photoelectron spectroscopy (XPS) analysis of first row transition metals, oxides and hydroxides is challenging due to the complexity of their M 2p spectra. Complex multiplet splitting, shake-up and plasmon loss structure can play a role in the interpretation of the chemical states present. This paper will show practical curve fitting procedures for the quantitative measurement of different chemical states for metal oxides and hydroxides from a survey of transition metals. It will also discuss some of the limitations and pitfalls present as well as give practical examples of their successful use. These curve-fitting procedures are based on 1) standard spectra from quality reference samples, 2) a survey of appropriate literature databases and/or a compilation of literature references, 3) fitting of multiplet split spectra based on spectra of numerous reference materials and theoretical modelling, 4) spectral subtractions routines, again using reference spectra, and 5) specific literature references where fitting procedures are available.
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页数:4
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