Strong white and blue photoluminescence from silicon nanocrystals in SiNx grown by remote PECVD using SiCl4/NH3

被引：50
作者：
Benami, A.
Santana, G.
Ortiz, A.
Ponce, A.
Romeu, D.
Aguilar-Hernandez, J.
Contreras-Puente, G.
Alonso, J. C.
机构：
[1] Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
[2] Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 04510, DF, Mexico
[3] IPN, Escuela Super Fis & Matemat, Mexico City 07738, DF, Mexico
来源：
NANOTECHNOLOGY | 2007年 / 18卷 / 15期
关键词：
D O I：
10.1088/0957-4484/18/15/155704
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Strong white and blue photoluminescence (PL) from as-grown silicon nanocrystals (nc-Si) in SiNx films prepared by remote plasma enhanced chemical vapour deposition using SiCl4/NH3 mixtures is reported. The colour and intensity of the PL could be controlled by adjusting the NH3 flow rate. Samples with white emission were annealed at 1000 degrees C, obtaining a strong improvement of the PL intensity with a blue colour. The PL can be attributed to quantum confinement effect in nc-Si embedded in SiNx matrix, which is improved when a better passivation of nc-Si surface with chlorine and nitrogen atoms is obtained. The size, density and structure of the nc-Si in the as-grown and annealed films were confirmed and measured by high-resolution transmission electron microscopy.
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页数：5
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