共 4 条
- [1] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
- [2] PROGRESS IN DEEP-ETCH SYNCHROTRON RADIATION LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 178 - 182
- [3] Markowski W., 1990, Materialpruefung, V32, P144
- [4] MAZZA E, 1996, MICRO SYSTEM TECHNOL, V2, P226