"Water window" compact, table-top laser plasma soft X-ray sources based on a gas puff target

被引:73
作者
Wachulak, P. W. [1 ]
Bartnik, A. [1 ]
Fiedorowicz, H. [1 ]
Rudawski, P. [1 ]
Jarocki, R. [1 ]
Kostecki, J. [1 ]
Szczurek, M. [1 ]
机构
[1] Mil Univ Technol, Inst Optoelect, PL-00908 Warsaw, Poland
关键词
Soft X-rays; Soft X-ray sources; Water window" sources; Gas puff target; Laser applications; Laser-produced plasma; ZONE PLATES; MICROSCOPY; EMISSION;
D O I
10.1016/j.nimb.2010.02.002
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed compact, high repetition, table-top soft-X-ray sources, based on a gas puff target, emitting in "water window" spectral range at lambda = 2.88 nm from nitrogen gas target or, in 2-4 nm range of wavelengths, from argon gas target. Double stream gas puff target was pumped optically by commercial Nd:YAG laser, energy 0.74 J, pulse time duration 4 ns. Spatial distribution of laser-produced plasma was imaged using a pinhole camera. Using transmission grating spectrometer, argon and nitrogen emission spectra were obtained, showing strong emission in the "water window" spectral range. Using AXUV100 detector the flux measurements of the soft-X-ray pulses were carried out and are presented. These debris free sources are table-top alternative for free electron lasers and synchrotron installations. They can be successfully employed in microscopy, spectroscopy and metrology experiments among others. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:1692 / 1700
页数:9
相关论文
共 26 条
[1]  
[Anonymous], CXRO XRAY INTERACTIO
[2]  
Attwood D., 1999, SOFT XRAYS EXTREME U
[3]   SATURATED AND NEAR-DIFFRACTION-LIMITED OPERATION OF AN XUV LASER AT 23.6 NM [J].
CARILLON, A ;
CHEN, HZ ;
DHEZ, P ;
DWIVEDI, L ;
JACOBY, J ;
JAEGLE, P ;
JAMELOT, G ;
ZHANG, J ;
KEY, MH ;
KIDD, A ;
KLISNICK, A ;
KODAMA, R ;
KRISHNAN, J ;
LEWIS, CLS ;
NEELY, D ;
NORREYS, P ;
ONEILL, D ;
PERT, GJ ;
RAMSDEN, SA ;
RAUCOURT, JP ;
TALLENTS, GJ ;
UHOMOIBHI, J .
PHYSICAL REVIEW LETTERS, 1992, 68 (19) :2917-2920
[4]  
CEFALAS AC, 1998, RALTR98007 NAT HELL
[5]   X-RAY LASER MICROSCOPY OF RAT SPERM NUCLEI [J].
DASILVA, LB ;
TREBES, JE ;
BALHORN, R ;
MROWKA, S ;
ANDERSON, E ;
ATTWOOD, DT ;
BARBEE, TW ;
BRASE, J ;
CORZETT, M ;
GRAY, J ;
KOCH, JA ;
LEE, C ;
KERN, D ;
LONDON, RA ;
MACGOWAN, BJ ;
MATTHEWS, DL ;
STONE, G .
SCIENCE, 1992, 258 (5080) :269-271
[6]   Compact laser plasma EUV source based on a gas puff target for metrology [J].
Fiedorowicz, H ;
Bartnik, A ;
Jarocki, R ;
Kostecki, J ;
Krzywinski, J ;
Mikolajczyk, J ;
Rakowski, R ;
Szczurek, A ;
Szczurek, M .
JOURNAL OF ALLOYS AND COMPOUNDS, 2005, 401 (1-2) :99-103
[7]   Investigation of soft X-ray emission from a gas puff target irradiated with a Nd:YAG laser [J].
Fiedorowicz, H ;
Bartnik, A ;
Szczurek, H ;
Daido, H ;
Sakaya, N ;
Kmetik, V ;
Kato, Y ;
Suzuki, M ;
Matsumura, M ;
Tajima, J ;
Nakayama, T ;
Wilhein, T .
OPTICS COMMUNICATIONS, 1999, 163 (1-3) :103-114
[8]   X-ray emission in the 'water window' from a nitrogen gas puff target irradiated with a nanosecond Nd:Glass laser pulse [J].
Fiedorowicz, H ;
Bartnik, A ;
Jarocki, R ;
Szczurek, M ;
Wilhein, T .
APPLIED PHYSICS B-LASERS AND OPTICS, 1998, 67 (03) :391-393
[9]   Enhanced X-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double-nozzle setup [J].
Fiedorowicz, H ;
Bartnik, A ;
Jarocki, R ;
Rakowski, R ;
Szczurek, M .
APPLIED PHYSICS B-LASERS AND OPTICS, 2000, 70 (02) :305-308
[10]   PROTOTYPE HIGH-SPEED TAPE TARGET TRANSPORT FOR A LASER-PLASMA SOFT-X-RAY PROJECTION LITHOGRAPHY SOURCE [J].
HANEY, SJ ;
BERGER, KW ;
KUBIAK, GD ;
ROCKETT, PD ;
HUNTER, J .
APPLIED OPTICS, 1993, 32 (34) :6934-6937