Injection moulding of high aspect ratio micron-scale thickness polymeric microcantilevers

Tipless thermoplastic microcantilevers suitable for chemical and biological sensing applications were fabricated by injection moulding. Their stiffnesses and resonant frequencies were each determined by two techniques. Polystyrene beams produced by this method exhibited stiffnesses ranging from 0.01 to 10 N m(-1) making them feasible for biosensing applications. The approach proved repeatable with low standard deviations on the parameters measured on 22 microcantilever beams (stiffness and first-mode resonant frequency) made from the same mould. The variations were much lower than those of similar, commercially available, silicon-type beams. The polymeric microcantilevers were shown to be of at least equal calibre to commercially available microcantilevers.