Single-photon avalanche diodes in 0.18-μm high-voltage CMOS technology

被引:32
作者
Huang, L. D. [1 ]
Wu, J. Y. [2 ]
Wang, J. P. [1 ]
Tsai, C. M. [1 ]
Huang, Y. H. [1 ]
Wu, D. R. [1 ]
Lin, S. D. [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Elect Engn, 1001 Univ Rd, Hsinchu 300, Taiwan
[2] Ind Technol Res Inst, Informat & Commun Res Labs, Hsinchu 310, Taiwan
关键词
TIME; NM; PHOTODIODE; RESOLUTION; DETECTOR; ARRAY; SPAD;
D O I
10.1364/OE.25.013333
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We have designed and fabricated high-performance single-photon avalanche diodes (SPADs) by using 0.18-mu m high-voltage CMOS technology. Without any technology customization. the SPADs have low dark-count rate, high photon-detection probability, low afterpulsing probability, and acceptable timing jitter and breakdown voltage. Our design provides a low-cost and high-performance SPAD for various applications. (C) 2017 Optical Society of America
引用
收藏
页码:13333 / 13339
页数:7
相关论文
共 25 条
[1]   Fast single-photon avalanche diode arrays for laser Raman spectroscopy [J].
Blacksberg, Jordana ;
Maruyama, Yuki ;
Charbon, Edoardo ;
Rossman, George R. .
OPTICS LETTERS, 2011, 36 (18) :3672-3674
[2]   Single-photon imaging in complementary metal oxide semiconductor processes [J].
Charbon, E. .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2014, 372 (2012)
[3]   TOWARDS PICOSECOND RESOLUTION WITH SINGLE-PHOTON AVALANCHE-DIODES [J].
COVA, S ;
LONGONI, A ;
ANDREONI, A .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (03) :408-412
[4]   Fully integrated single photon avalanche diode detector in standard CMOS 0.18-μm technology [J].
Faramarzpour, Naser ;
Deen, M. Jarnal ;
Shirani, Shahram ;
Fang, Qiyin .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2008, 55 (03) :760-767
[5]   Low-noise single-photon avalanche diodes in 0.25 μm high-voltage CMOS technology [J].
Hsu, Fang-Ze ;
Wu, Jau-Yang ;
Lin, Sheng-Di .
OPTICS LETTERS, 2013, 38 (01) :55-57
[6]   A CMOS STI-Bound Single-Photon Avalanche Diode With 27-ps Timing Resolution and a Reduced Diffusion Tail [J].
Hsu, Mark J. ;
Finkelstein, Hod ;
Esener, Sadik C. .
IEEE ELECTRON DEVICE LETTERS, 2009, 30 (06) :641-643
[7]   Design, Characterization and Analysis of a 0.35 μm CMOS SPAD [J].
Jradi, Khalil ;
Pellion, Denis ;
Ginhac, Dominique .
SENSORS, 2014, 14 (12) :22773-22784
[8]   INFRARED DETECTION BY AVALANCHE DISCHARGE IN SILICON P-N JUNCTIONS [J].
KEIL, G ;
BERNT, H .
SOLID-STATE ELECTRONICS, 1966, 9 (04) :321-+
[9]   Real-time fluorescence lifetime imaging system with a 32 x 32 0.13μm CMOS low dark-count single-photon avalanche diode array [J].
Li, Day-Uei ;
Arlt, Jochen ;
Richardson, Justin ;
Walker, Richard ;
Buts, Alex ;
Stoppa, David ;
Charbon, Edoardo ;
Henderson, Robert .
OPTICS EXPRESS, 2010, 18 (10) :10257-10269
[10]   A wide spectral range single-photon avalanche diode fabricated in an advanced 180 nm CMOS technology [J].
Mandai, Shingo ;
Fishburn, Matthew W. ;
Maruyama, Yuki ;
Charbon, Edoardo .
OPTICS EXPRESS, 2012, 20 (06) :5849-5857