Fs-laser processing of medical grade polydimethylsiloxane (PDMS)

被引：27

作者：

Atanasov, P. A. ^{[1
]}

Stankova, N. E. ^{[1
]}

Nedyalkov, N. N. ^{[1
]}

Fukata, N. ^{[2
]}

Hirsch, D. ^{[3
]}

Rauschenbach, B. ^{[3
]}

Amoruso, S. ^{[4
,5
]}

Wang, X. ^{[4
,5
]}

Kolev, K. N. ^{[6
]}

Valova, E. I. ^{[6
]}

Georgieva, J. S. ^{[6
]}

Armyanov, St. A. ^{[6
]}

机构：

[1] Bulgarian Acad Sci, Inst Elect, 72 Tsaridradsko Shose Blvd, Sofia 1784, Bulgaria

[2] Natl Inst Mat Sci, Int Ctr Mat NanoArchitecton MANA, 1-1 Namiki, Tsukuba, Ibaraki 3050044, Japan

[3] Leibniz Inst Surface Modificat IOM, Permoserstr 15, D-04318 Leipzig, Germany

[4] Univ Naples Federico II, Dipartmento Fis, Via Cintia, I-80126 Naples, Italy

[5] Complesso Univ Monte S Angelo, CNR SPIN, Via Cintia, I-80126 Naples, Italy

[6] Bulgarian Acad Sci, Rostislaw Kaischew Inst Phys Chem, Acad G Bonchev Str,Block 11, Sofia 1113, Bulgaria

来源：

APPLIED SURFACE SCIENCE | 2016年 / 374卷

关键词：

PDMS-elastomer; IR; VIS and UV fs-laser processing; mu-Raman spectrometry; AFM and SEM analyses; Metallization; SILICONE-RUBBER; POLY(DIMETHYLSILOXANE); IRRADIATION; FABRICATION;

D O I：

10.1016/j.apsusc.2015.11.175

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Medical grade polydimethylsiloxane (PDMS) elastomer is a biomaterial widely used in medicine and high-tech devices, e.g. MEMS and NEMS. In this work, we report an experimental investigation on femtosecond laser processing of PDMS-elastomer with near infrared (NIR), visible (VIS) and ultraviolet (UV) pulses. High definition trenches are produced by varying processing parameters as laser wavelength, pulse duration, fluence, scanning speed and overlap of the subsequent pulses. The sample surface morphology and chemical composition are investigated by Laser Microscopy, SEM and Raman spectroscopy, addressing the effects of the various processing parameters through comparison with the native materials characteristics. For all the laser pulse wavelengths used, the produced tracks are successfully metalized with Ni via electro-less plating method. We observe a negligible influence of the time interval elapsed between laser treatment and metallization process. Our experimental findings suggest promising perspectives of femtosecond laser pulses in micro- and nano-fabrication of hi-tech PDMS devices. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：229 / 234

页数：6

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