A displacement measurement technique using millimeter-wave interferometry

被引：72
|
作者：
Kim, S [1 ]
Nguyen, C [1 ]
机构：
[1] Texas A&M Univ, Dept Elect Engn, College Stn, TX 77843 USA
来源：
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2003年 / 51卷 / 06期
关键词：
displacement measurement; microwave interferometer; millimeter-wave interferometer; sensor;
D O I：
10.1109/TMTT.2003.812575
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A displacement measurement sensor, capable of sub-millimeter resolution, using millimeter-wave interferometry has been developed. The sensor operates at 37.6 GHz and is realized using both microwave integrated circuits and monolithic microwave integrated circuits. It has been used to accurately measure the displacement of metal plate location and water level. A resolution of only 0.05 mm is achieved. A maximum error of 0.3 mm is also attained without correction for the nonlinearity of the phase-detection processor and agrees well with the theoretical calculation.
引用
收藏
页码：1724 / 1728
页数：5
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